Presentation | 2001/6/8 High reflective GaN/Al_<0.6>Ga_<0.4>N distributed Bragg reflector for VCSEL Naoyuki Nakada, Hiroyasu Ishikawa, Takashi Egawa, Takashi Jimbo, Masayoshi Umeno, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | GaN/AlGaN distributed Bragg reflectors (DBR) were grown under the low-pressure condition by MOCVD. Those structures were fabricated on the atmospheric pressure grown GaN layer on sapphire substrate. The Al content of AIGaN was estimated O.6 by X-ray dirfraction. The flat surfaces without cracks were succcssfully obtained for the growth of GaN/Al_<0.6>Ga_<0.4>N DBR. For 45.5 pairs, the peak reflectivity of over 98 % was obtained at a wavelength of 421 nm. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | GaN / AIGaN / MOCVD / LP-MOCVD / DBR / VCSEL |
Paper # | LQE2001-28 |
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Conference Information | |
Committee | LQE |
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Conference Date | 2001/6/8(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
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Chair | |
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Assistant |
Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | High reflective GaN/Al_<0.6>Ga_<0.4>N distributed Bragg reflector for VCSEL |
Sub Title (in English) | |
Keyword(1) | GaN |
Keyword(2) | AIGaN |
Keyword(3) | MOCVD |
Keyword(4) | LP-MOCVD |
Keyword(5) | DBR |
Keyword(6) | VCSEL |
1st Author's Name | Naoyuki Nakada |
1st Author's Affiliation | Department of Electrical and Computer Engineering,Nagoya Institute of Technology() |
2nd Author's Name | Hiroyasu Ishikawa |
2nd Author's Affiliation | Research Center for Micro-Structure Devices,Nagoya Institute of Technology |
3rd Author's Name | Takashi Egawa |
3rd Author's Affiliation | Research Center for Micro-Structure Devices,Nagoya Institute of Technology |
4th Author's Name | Takashi Jimbo |
4th Author's Affiliation | Department of Environmental Technology and Urban Planning,Nagoya Institute of Technology |
5th Author's Name | Masayoshi Umeno |
5th Author's Affiliation | Department of Electronics Engineering, Chubu University |
Date | 2001/6/8 |
Paper # | LQE2001-28 |
Volume (vol) | vol.101 |
Number (no) | 113 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |