| Presentation | 2001/6/8 0xygen Gas Pressure Dependence of PLD-SiO_2 Thin Films with Organopolysiloxane Targets Masaaki Kuramatsu, Masayuki Okoshi, Narumi Inoue, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | SiO_2 ttin films were fabricated at room temperature by ablation of organopolysiloxane with an ArF excimerlaser. (Si-0)_n chains of the target were selectively deposited on a substrate in high laser fluence at about 10 J/cm^2. When we used oxygen gas during ablation, Si-0-Si bonds of the films approached those of a silica glass, in addition to reducing carbon mixed into the films. As a result, the transmittance of the 400-nm-thick film showed about 95% at a 500 nm wavelength. The refractive index was 1.416 at a 633 nm wavelength. The electrical resistivity of higher than 10 Ωm was also obtained. From the x-ray photoelectron spectroscopy spectra, the Si 2p peak of the films indicated to be SiO_2. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | organopolysiloxane / pulsed laser deposition(PLD) / So0_2 thin films / ArF excimer laser / oxygen gas |
| Paper # | LQE2001-16 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2001/6/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | 0xygen Gas Pressure Dependence of PLD-SiO_2 Thin Films with Organopolysiloxane Targets |
| Sub Title (in English) | |
| Keyword(1) | organopolysiloxane |
| Keyword(2) | pulsed laser deposition(PLD) |
| Keyword(3) | So0_2 thin films |
| Keyword(4) | ArF excimer laser |
| Keyword(5) | oxygen gas |
| 1st Author's Name | Masaaki Kuramatsu |
| 1st Author's Affiliation | Department of Electrical and Electronic Engineering, National Defense Academy() |
| 2nd Author's Name | Masayuki Okoshi |
| 2nd Author's Affiliation | Department of Electrical and Electronic Engineering, National Defense Academy |
| 3rd Author's Name | Narumi Inoue |
| 3rd Author's Affiliation | Department of Electrical and Electronic Engineering, National Defense Academy |
| Date | 2001/6/8 |
| Paper # | LQE2001-16 |
| Volume (vol) | vol.101 |
| Number (no) | 113 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |