Presentation 2000/1/18
Effects of Roughness in Side Walls of Optical Waveguides on Propagation Loss in Relation to Relative Index Difference
Tadashi Wariaki, Hiroaki Kurokawa, Michiko Kuroda, Kunihiko Asama,
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Abstract(in English) In this study we analyzed optical propagation properties due to the roughness of side walls in waveguides(core), which is resulted in the patterning process such as RIE, UV curing, and so on. In the simulation we evaluated the increase in loss due to the side-wall roughness, where the width of waveguides varied sinusoidally and randomly in the models. As a parameter, we pay attention to relative index difference between core and clad. The Beam Propagation Method(FD-BPM)with Pade approximation is used in the simulation.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) RIE / UV cure / relative index difference / beam propagation method
Paper # PS99-74, OPE99-122, LQE99-113
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Committee LQE
Conference Date 2000/1/18(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Effects of Roughness in Side Walls of Optical Waveguides on Propagation Loss in Relation to Relative Index Difference
Sub Title (in English)
Keyword(1) RIE
Keyword(2) UV cure
Keyword(3) relative index difference
Keyword(4) beam propagation method
1st Author's Name Tadashi Wariaki
1st Author's Affiliation School of Engineering, Tokyo University of Technology()
2nd Author's Name Hiroaki Kurokawa
2nd Author's Affiliation School of Engineering, Tokyo University of Technology
3rd Author's Name Michiko Kuroda
3rd Author's Affiliation School of Engineering, Tokyo University of Technology
4th Author's Name Kunihiko Asama
4th Author's Affiliation School of Engineering, Tokyo University of Technology
Date 2000/1/18
Paper # PS99-74, OPE99-122, LQE99-113
Volume (vol) vol.99
Number (no) 545
Page pp.pp.-
#Pages 6
Date of Issue