Presentation 1999/10/20
PhOtO-CVDUSingVacuumuItravioletraregasexcimerlamps
Kawasaki YaSUhirO, Yokotani Atsushi, Takezoe Noritaka, Kurosawa Kou, Igarashi Tatsushi, MatSUnO Hiromitsu, Miyano Jyunichi,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) RaregaSeXCimerlampsarenewcompactandefIllcienthghtsource梳rgeneratingthevacuumUltravi01etradiat10n.Ont11isbackgI-Ound,wetriedtoformthinsilica鵬sbypho拓-cVII(Che娠耐VaPOrDePOSit10n)PrOCeSSUSingtheeXCiInerlamps.Weused′tetI′aethOXyOrthOSiliCate(rIiEOS)aSaStartingmaterial.Sm00thSiliCafilnlshavebeenobtainedwiththewavelengthswhichaI′eshorterthan172nm.ImPrOVingthefilnlquahtybymixingtheN20withstartingmaterialwasalsodiscussed.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) photo-CVD,excimerlamp,TEOS,vacuumultraviolet,silicafilrn
Paper # LQE99-66
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Conference Information
Committee LQE
Conference Date 1999/10/20(1days)
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Paper Information
Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) PhOtO-CVDUSingVacuumuItravioletraregasexcimerlamps
Sub Title (in English)
Keyword(1) photo-CVD,excimerlamp,TEOS,vacuumultraviolet,silicafilrn
1st Author's Name Kawasaki YaSUhirO
1st Author's Affiliation University of Miyazaki()
2nd Author's Name Yokotani Atsushi
2nd Author's Affiliation University of Miyazaki
3rd Author's Name Takezoe Noritaka
3rd Author's Affiliation /
4th Author's Name Kurosawa Kou
4th Author's Affiliation / /
5th Author's Name Igarashi Tatsushi
5th Author's Affiliation
6th Author's Name MatSUnO Hiromitsu
6th Author's Affiliation
7th Author's Name Miyano Jyunichi
7th Author's Affiliation
Date 1999/10/20
Paper # LQE99-66
Volume (vol) vol.99
Number (no) 364
Page pp.pp.-
#Pages 6
Date of Issue