| Presentation | 1999/10/20 PhOtO-CVDUSingVacuumuItravioletraregasexcimerlamps Kawasaki YaSUhirO, Yokotani Atsushi, Takezoe Noritaka, Kurosawa Kou, Igarashi Tatsushi, MatSUnO Hiromitsu, Miyano Jyunichi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | RaregaSeXCimerlampsarenewcompactandefIllcienthghtsource梳rgeneratingthevacuumUltravi01etradiat10n.Ont11isbackgI-Ound,wetriedtoformthinsilica鵬sbypho拓-cVII(Che娠耐VaPOrDePOSit10n)PrOCeSSUSingtheeXCiInerlamps.Weused′tetI′aethOXyOrthOSiliCate(rIiEOS)aSaStartingmaterial.Sm00thSiliCafilnlshavebeenobtainedwiththewavelengthswhichaI′eshorterthan172nm.ImPrOVingthefilnlquahtybymixingtheN20withstartingmaterialwasalsodiscussed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | photo-CVD,excimerlamp,TEOS,vacuumultraviolet,silicafilrn |
| Paper # | LQE99-66 |
| Date of Issue |
| Conference Information | |
| Committee | LQE |
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| Conference Date | 1999/10/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | PhOtO-CVDUSingVacuumuItravioletraregasexcimerlamps |
| Sub Title (in English) | |
| Keyword(1) | photo-CVD,excimerlamp,TEOS,vacuumultraviolet,silicafilrn |
| 1st Author's Name | Kawasaki YaSUhirO |
| 1st Author's Affiliation | University of Miyazaki() |
| 2nd Author's Name | Yokotani Atsushi |
| 2nd Author's Affiliation | University of Miyazaki |
| 3rd Author's Name | Takezoe Noritaka |
| 3rd Author's Affiliation | / |
| 4th Author's Name | Kurosawa Kou |
| 4th Author's Affiliation | / / |
| 5th Author's Name | Igarashi Tatsushi |
| 5th Author's Affiliation | |
| 6th Author's Name | MatSUnO Hiromitsu |
| 6th Author's Affiliation | |
| 7th Author's Name | Miyano Jyunichi |
| 7th Author's Affiliation | |
| Date | 1999/10/20 |
| Paper # | LQE99-66 |
| Volume (vol) | vol.99 |
| Number (no) | 364 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |