| Presentation | 1999/10/20 Dcvc10pmcntofthchighlascrrcsistantCLBOcrysta1surfaccandgcncrationorthcUV Kamimura Tomosumi, Nakai Kazuhito, R11ch10no R, Yoshimura Masashi, YokeKhin Yap, Mori Yusuke, Sasaki Takatomo, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | CSLiB60(.(CLBO)cangcncratchigh-cfficjcnttherour[h(266nm)andfifth(2130m)1]aIIIonicgcncrat10norNd:YAGlascrs.Howcvcr,inhigh-powcrUVOPCratiOn,山cdamagcsonpolishcdsurface80rten11mit{l1Cper[ormanccofthccrystalasthatoccurredinotherUVmaterials.ThescopticaldamagcwereoccurrcdductoabsoI′ptionofthepo11shingcompoundembeddedinsidethe8urface.Wehavefoundthat11hC8Cpolishingcompoundscanbccomplctelye11minatedbyan10n-bcamctchingproccss.Inthisstudy,山ccfrcctsorion-bcamctchingonsurraccdamagercsjstivitywcreinvcstigatedinCLBOcrysta1 |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | CsLiB6011)(CLBO),p011shingcompound,ionbcametching,sし11′faCedamagc |
| Paper # | LQE99-63 |
| Date of Issue |
| Conference Information | |
| Committee | LQE |
|---|---|
| Conference Date | 1999/10/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Dcvc10pmcntofthchighlascrrcsistantCLBOcrysta1surfaccandgcncrationorthcUV |
| Sub Title (in English) | |
| Keyword(1) | CsLiB6011)(CLBO),p011shingcompound,ionbcametching,sし11′faCedamagc |
| 1st Author's Name | Kamimura Tomosumi |
| 1st Author's Affiliation | DepartmcntofElcctricaIEngineering,OsakaUnivcrsity() |
| 2nd Author's Name | Nakai Kazuhito |
| 2nd Author's Affiliation | DepartmcntofElcctricaIEngineering,OsakaUnivcrsity |
| 3rd Author's Name | R11ch10no R |
| 3rd Author's Affiliation | DepartmcntofElcctricaIEngineering,OsakaUnivcrsity |
| 4th Author's Name | Yoshimura Masashi |
| 4th Author's Affiliation | DepartmcntofElcctricaIEngineering,OsakaUnivcrsity |
| 5th Author's Name | YokeKhin Yap |
| 5th Author's Affiliation | DepartmcntofElcctricaIEngineering,OsakaUnivcrsity |
| 6th Author's Name | Mori Yusuke |
| 6th Author's Affiliation | DepartmcntofElcctricaIEngineering,OsakaUnivcrsity |
| 7th Author's Name | Sasaki Takatomo |
| 7th Author's Affiliation | DepartmcntofElcctricaIEngineering,OsakaUnivcrsity |
| Date | 1999/10/20 |
| Paper # | LQE99-63 |
| Volume (vol) | vol.99 |
| Number (no) | 364 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |