| Presentation | 1999/8/27 Surface pretreatment in wafer direct bonding for integrated optical isolator Hideki YOKOI, Tetsuya MIZUMOTO, Masafumi SHIMIZU, Takashi WANIISHI, Naoki FUTAKUCHI, Noriaki KAIDA, Yoshiaki NAKANO, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | An integrated optical isolator with a semiconductor guiding layer can be constructed by wafer direct bonding technique, by which two wafers are contacted without any adhesives. The direct bonding between GalnAsP and garnet crystals has been investigated to realize the integrated optical isolator employing a nonreciprocal phase shift. Experimental results of contact angle measurement of wafer surfaces with various treatments for the direct bonding are described. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Optical isolator / direct bonding / semiconductor / garnet / contact angle measurement |
| Paper # | LQE99-48 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 1999/8/27(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Surface pretreatment in wafer direct bonding for integrated optical isolator |
| Sub Title (in English) | |
| Keyword(1) | Optical isolator |
| Keyword(2) | direct bonding |
| Keyword(3) | semiconductor |
| Keyword(4) | garnet |
| Keyword(5) | contact angle measurement |
| 1st Author's Name | Hideki YOKOI |
| 1st Author's Affiliation | Department of Physical Electronics, Faculty of Engineering, Tokyo lnstitute of Technology() |
| 2nd Author's Name | Tetsuya MIZUMOTO |
| 2nd Author's Affiliation | Department of Physical Electronics, Faculty of Engineering, Tokyo lnstitute of Technology |
| 3rd Author's Name | Masafumi SHIMIZU |
| 3rd Author's Affiliation | Department of Physical Electronics, Faculty of Engineering, Tokyo lnstitute of Technology |
| 4th Author's Name | Takashi WANIISHI |
| 4th Author's Affiliation | Department of Physical Electronics, Faculty of Engineering, Tokyo lnstitute of Technology |
| 5th Author's Name | Naoki FUTAKUCHI |
| 5th Author's Affiliation | Department of Electronic Engineering, School of Engineering, The University of Tokyo |
| 6th Author's Name | Noriaki KAIDA |
| 6th Author's Affiliation | Department of Electronic Engineering, School of Engineering, The University of Tokyo |
| 7th Author's Name | Yoshiaki NAKANO |
| 7th Author's Affiliation | Department of Electronic Engineering, School of Engineering, The University of Tokyo |
| Date | 1999/8/27 |
| Paper # | LQE99-48 |
| Volume (vol) | vol.99 |
| Number (no) | 280 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |