| Presentation | 1998/11/20 A InP HEMT Technology for 4 0 Gbit/s Optical communications Yasuro Yamane, Yoshino Fukai, Takatomo Enoki, Hiroto Kitabayashi, Yohtaro Umeda, Yasunobu Ishii, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Device design and fabrication technology for 40 Gbit/s optical communication systems using InP HEMT technology are sdescribed in this report. The demand to the FET performance for 40 Gbit/s IC operation is clarified by applying analytical expression which combine FET characteristics and IC delay time. And, the fabrication technology which enables us to make a FET whose performance satisfys the above mentioned condition for 40 Gbit/s IC operation., will be presented. And the uniformity of FET characteristics is improved by applying InP etch stopper and EB-lithography. At last, the fabricated IC prformance and thermal stability are reported. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | InP / InGaAs / InAlAs / IC / HEMT / EB-lithography |
| Paper # | OCS98-68,ED98-159,OPE98-100,LQE98-99 |
| Date of Issue |
| Conference Information | |
| Committee | LQE |
|---|---|
| Conference Date | 1998/11/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A InP HEMT Technology for 4 0 Gbit/s Optical communications |
| Sub Title (in English) | |
| Keyword(1) | InP |
| Keyword(2) | InGaAs |
| Keyword(3) | InAlAs |
| Keyword(4) | IC |
| Keyword(5) | HEMT |
| Keyword(6) | EB-lithography |
| 1st Author's Name | Yasuro Yamane |
| 1st Author's Affiliation | NTT System Electronics Laboratories() |
| 2nd Author's Name | Yoshino Fukai |
| 2nd Author's Affiliation | NTT System Electronics Laboratories |
| 3rd Author's Name | Takatomo Enoki |
| 3rd Author's Affiliation | NTT System Electronics Laboratories |
| 4th Author's Name | Hiroto Kitabayashi |
| 4th Author's Affiliation | NTT System Electronics Laboratories |
| 5th Author's Name | Yohtaro Umeda |
| 5th Author's Affiliation | NTT System Electronics Laboratories |
| 6th Author's Name | Yasunobu Ishii |
| 6th Author's Affiliation | NTT System Electronics Laboratories |
| Date | 1998/11/20 |
| Paper # | OCS98-68,ED98-159,OPE98-100,LQE98-99 |
| Volume (vol) | vol.98 |
| Number (no) | 418 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |