| Presentation | 1998/7/3 In-plane thickness control MOCVD using a silicon shadow mask for 1.3μm beam expander-integrated laser diodes Masaaki Komori, Akira Taike, Masahiro Aoki, Hiroshi Sato, Kazuhisa Uomi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A 1.3-μm beam expander-integrated laser diode was fabricated by the in-plane thickness control MOCVD using a silicon shadow mask. For the optimization of InP-based thickness-tapered guided-wave structures, we investigated the dependence of growth rate reduction of thickness-tapered region on the shadow mask width and on the distance between the shadow mask and InP substrate. As a result, 1.3μm reversed-mesa ridge-waveguide Structure lasers integrated with a thickness-tapered waveguide devices was demonstrated with a low threshold current of 15mA and a narrow FFP of 13°. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MOCVD using a silicon shadow mask / thickness-tapered waveguide structures / 1.3-μm beam expander-integrated laser diodes |
| Paper # | OPE98-44,LQE98-38 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 1998/7/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | In-plane thickness control MOCVD using a silicon shadow mask for 1.3μm beam expander-integrated laser diodes |
| Sub Title (in English) | |
| Keyword(1) | MOCVD using a silicon shadow mask |
| Keyword(2) | thickness-tapered waveguide structures |
| Keyword(3) | 1.3-μm beam expander-integrated laser diodes |
| 1st Author's Name | Masaaki Komori |
| 1st Author's Affiliation | Central Research Laboratory, Hitachi, Ltd.() |
| 2nd Author's Name | Akira Taike |
| 2nd Author's Affiliation | Central Research Laboratory, Hitachi, Ltd. |
| 3rd Author's Name | Masahiro Aoki |
| 3rd Author's Affiliation | Central Research Laboratory, Hitachi, Ltd. |
| 4th Author's Name | Hiroshi Sato |
| 4th Author's Affiliation | Central Research Laboratory, Hitachi, Ltd. |
| 5th Author's Name | Kazuhisa Uomi |
| 5th Author's Affiliation | Central Research Laboratory, Hitachi, Ltd. |
| Date | 1998/7/3 |
| Paper # | OPE98-44,LQE98-38 |
| Volume (vol) | vol.98 |
| Number (no) | 167 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |