| Presentation | 1998/8/28 Study of the vacuum vapour deposition method for silica-based PLC Chip F. Matsumura, H. Matsumoto, K. Nakasendou, H. Tanaka, Y. Fujii, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | FHD method realized many kinds of silica-based PLC devices recently. But FHD method needs high temperature anneal process(over 1000℃), which may cause high stress for PLC waveguide. In this time, we successed to make silica-based PLC chip with only ion beam assist deposition method, in which the process temperature is less than 200℃, and got the vuried waveguide with silica-based PLC chip. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Sillica-based Planer Lightwave Circuit(PLC) / Flame Hydrolysis Deposition Method(FHD) / Anneal / Ion Beam Assist Deposition Method(IAD) / Vuried waveguide |
| Paper # | EMD98-54,CPM98-102,OPE98-75,LQE98-69 |
| Date of Issue |
| Conference Information | |
| Committee | LQE |
|---|---|
| Conference Date | 1998/8/28(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study of the vacuum vapour deposition method for silica-based PLC Chip |
| Sub Title (in English) | |
| Keyword(1) | Sillica-based Planer Lightwave Circuit(PLC) |
| Keyword(2) | Flame Hydrolysis Deposition Method(FHD) |
| Keyword(3) | Anneal |
| Keyword(4) | Ion Beam Assist Deposition Method(IAD) |
| Keyword(5) | Vuried waveguide |
| 1st Author's Name | F. Matsumura |
| 1st Author's Affiliation | Central Research Laboratories, TOYO Communication Equipment Co., Ltd() |
| 2nd Author's Name | H. Matsumoto |
| 2nd Author's Affiliation | Central Research Laboratories, TOYO Communication Equipment Co., Ltd |
| 3rd Author's Name | K. Nakasendou |
| 3rd Author's Affiliation | Central Research Laboratories, TOYO Communication Equipment Co., Ltd |
| 4th Author's Name | H. Tanaka |
| 4th Author's Affiliation | Central Research Laboratories, TOYO Communication Equipment Co., Ltd |
| 5th Author's Name | Y. Fujii |
| 5th Author's Affiliation | College of Science and Technology, Nihon University |
| Date | 1998/8/28 |
| Paper # | EMD98-54,CPM98-102,OPE98-75,LQE98-69 |
| Volume (vol) | vol.98 |
| Number (no) | 256 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |