| Presentation | 1998/6/16 Formation of Iron and Iron Disilicide by Laser Ablation Masayuki OKOSHI, LIU Zhengxin, Mitsugu HANABUSA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Using pulsed laser deposition(PLD), we deposited iron and iron disilicide thin films on silicon or quartz substrates. Using iron targets of 99.999%, 99.99% and 99.7% purity, the iron films showed no corrosion in 0.001mol/l NaCl aqueous solution. We also found that particles mixed into the films caused corrosion when a cast iron was used as a target. In addition, we formed semiconducting iron desilicide(β-FeSi_2)thin films by depositing a pure iron on silicon substrate heated to 600 to 700℃ |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Laser ablation / Fe thin films / Corrosion-resistance / β-FeSi_2 thin films |
| Paper # | LQE98-17 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 1998/6/16(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Formation of Iron and Iron Disilicide by Laser Ablation |
| Sub Title (in English) | |
| Keyword(1) | Laser ablation |
| Keyword(2) | Fe thin films |
| Keyword(3) | Corrosion-resistance |
| Keyword(4) | β-FeSi_2 thin films |
| 1st Author's Name | Masayuki OKOSHI |
| 1st Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology() |
| 2nd Author's Name | LIU Zhengxin |
| 2nd Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| 3rd Author's Name | Mitsugu HANABUSA |
| 3rd Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| Date | 1998/6/16 |
| Paper # | LQE98-17 |
| Volume (vol) | vol.98 |
| Number (no) | 109 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |