Presentation 1996/12/10
Optical characterization of GaAs lateral p-n junctions using a near-field optical microscope
N. SAITO, F. SATO, K. TAKIZAWA, T. SAIKI, M. OHTSU,
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Abstract(in English) Simultaneous fabrication of p- and n-type regions on GaAs pattered substrates is expected to give high-quality p-n junctions. However, their microscopic quality remained unclear due to the unsatisfactory spatial resolution of conventional characterization methods. A near-field optical microscope is utilized for the first time for the optical characterization of lateral p-n junctions. Its high spatial resolution in the measurements of optical properties and surface morphology revealed: 1) The width of the transition region between the p-type and then n-type regions, determined from photoluminescence measurement, was 1.8μm for the junction formed at the upper end of the slope, while 5.5μm for the one at the lower end. 2) On the other hand, the width of the junctions determined from the distribution of light emulsion through current injection, was 1.1μm for both junctions.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Surface light emitting device / p-n junction / GaAs / MBE / Near-field optical microscope
Paper # LQE96-118
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Conference Information
Committee LQE
Conference Date 1996/12/10(1days)
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Paper Information
Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Optical characterization of GaAs lateral p-n junctions using a near-field optical microscope
Sub Title (in English)
Keyword(1) Surface light emitting device
Keyword(2) p-n junction
Keyword(3) GaAs
Keyword(4) MBE
Keyword(5) Near-field optical microscope
1st Author's Name N. SAITO
1st Author's Affiliation NHK Science and Technical Research Laboratories()
2nd Author's Name F. SATO
2nd Author's Affiliation NHK Science and Technical Research Laboratories
3rd Author's Name K. TAKIZAWA
3rd Author's Affiliation NHK Science and Technical Research Laboratories
4th Author's Name T. SAIKI
4th Author's Affiliation Kanagawa Academy of Science and Technology
5th Author's Name M. OHTSU
5th Author's Affiliation Tokyo Institute of Technology
Date 1996/12/10
Paper # LQE96-118
Volume (vol) vol.96
Number (no) 399
Page pp.pp.-
#Pages 6
Date of Issue