| Presentation | 1996/10/8 Fabrication of Nano-Structures Using EB-Lithography and Its Application to GaInAsP/InP Quantum-Wire Lasers Takashi Kojima, Munehisa Tamura, Xue-Ying Jia, Shigeo Tamura, Shigehisa Arai, Hiroyuki Nakaya, Suguru Tanaka, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | It is important to fabricate high-density and high-uniformity nano-structures for realization of quantum-wire lasers. In this work, 1.5μm-wavelength GaInAsP/InP quantum-wire lasers were fabricated by electron-beam lithography, and wet-chemical etching followed by embedding OMVPE growth. The average size of resist pattern for a period of 50nm was 30.7nm and the standard deviation was approximately ±1.1nm (3.6%). Temperature dependences of the lasers were measured and compared with those of quantum-film lasers fabricated on the same wafer. As the result, better lasing properties, such as low threshold current and high differential quantum efficiency of quantum-wire lasers over quantum-film lasers were confirmed at low temperature, and low threshold current density of 43A/cm^2 of the quantum-wire laser was obtained. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | electron-beam lithography / quantum-wire / quantum-wire-DFB / GaInAsP/InP / size-fluctuation |
| Paper # | LQE96-86 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 1996/10/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of Nano-Structures Using EB-Lithography and Its Application to GaInAsP/InP Quantum-Wire Lasers |
| Sub Title (in English) | |
| Keyword(1) | electron-beam lithography |
| Keyword(2) | quantum-wire |
| Keyword(3) | quantum-wire-DFB |
| Keyword(4) | GaInAsP/InP |
| Keyword(5) | size-fluctuation |
| 1st Author's Name | Takashi Kojima |
| 1st Author's Affiliation | Research Center for Quantum Effect Electronics, Tokyo Institute of Technology() |
| 2nd Author's Name | Munehisa Tamura |
| 2nd Author's Affiliation | Research Center for Quantum Effect Electronics, Tokyo Institute of Technology |
| 3rd Author's Name | Xue-Ying Jia |
| 3rd Author's Affiliation | Research Center for Quantum Effect Electronics, Tokyo Institute of Technology |
| 4th Author's Name | Shigeo Tamura |
| 4th Author's Affiliation | Research Center for Quantum Effect Electronics, Tokyo Institute of Technology |
| 5th Author's Name | Shigehisa Arai |
| 5th Author's Affiliation | Research Center for Quantum Effect Electronics, Tokyo Institute of Technology |
| 6th Author's Name | Hiroyuki Nakaya |
| 6th Author's Affiliation | Research Center for Quantum Effect Electronics, Tokyo Institute of Technology |
| 7th Author's Name | Suguru Tanaka |
| 7th Author's Affiliation | Research Center for Quantum Effect Electronics, Tokyo Institute of Technology |
| Date | 1996/10/8 |
| Paper # | LQE96-86 |
| Volume (vol) | vol.96 |
| Number (no) | 290 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |