Presentation 1998/1/22
Distributed Feedback Laser with Air/Semiconductor Gratings Formed by Mass-Transport Assisted Wafer Fusion Technique
Masahiro Imada, Toyotsugu Ishibashi, Susumu Noda,
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Abstract(in English) We report on the characteristics of distributed feedback laser with air/semiconductor gratings embedded by wafer fusion technique. The air/semiconductor gratings with 0.4μm period and 0.2μm depth are formed uniformly in a semiconductor by wafer fusion technique. The mass-transport phenomenon occurs at the fused interface, by which we can obtain good I-V characteristics. We demonstrate a single longitudinal mode oscillation at about 1.28μm under pulsed condition at room temperature. The threshold current density is estimated to be 1.3kA/cm^2 and coupling coefficient is also estimated to be over 100cm^<-1>. The high power surface-emission (over 7mW) is also demonstrated. The results demonstrate the feasibility of applying wafer fusion technique to embed gratings in a semiconductor and many applications are expected.
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Keyword(in English) wafer fusion / distributed feedback lasers / gratings / mass-transport / surface-emitting lasers / InP
Paper # LQE97-138
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Committee LQE
Conference Date 1998/1/22(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Distributed Feedback Laser with Air/Semiconductor Gratings Formed by Mass-Transport Assisted Wafer Fusion Technique
Sub Title (in English)
Keyword(1) wafer fusion
Keyword(2) distributed feedback lasers
Keyword(3) gratings
Keyword(4) mass-transport
Keyword(5) surface-emitting lasers
Keyword(6) InP
1st Author's Name Masahiro Imada
1st Author's Affiliation Department of Electronic Science and Engineering, Kyoto University()
2nd Author's Name Toyotsugu Ishibashi
2nd Author's Affiliation Department of Electronic Science and Engineering, Kyoto University
3rd Author's Name Susumu Noda
3rd Author's Affiliation Department of Electronic Science and Engineering, Kyoto University
Date 1998/1/22
Paper # LQE97-138
Volume (vol) vol.97
Number (no) 497
Page pp.pp.-
#Pages 5
Date of Issue