Presentation | 1997/11/5 On Wafer Fabriction Technology of Different-wavelength Light Sources for WDM Application Koji KUDO, Masashige ISHIZAKA, Tatsuya SASAKI, Hiroyuki YAMAZAKI, Masayuki YAMAGUCHI, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We report detuning-adjusted different-wavelength light sources fabricated on a single wafer that can operate uniformly over a wide wavelength range from 1.52-1.59 μm. These light sources were fabricated by using newly developed electron beam (EB) lithography for grating formation and narrow-stripe selective metal-organic vapor phase epitaxy (MOVPE) for adjusting the gain peak of the active layer to the Bragg wavelengths. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | WDM / Selective MOVPE / EB lithography / Modulator / DFB lasers / Detuning adjustment |
Paper # | LQE97-109 |
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Conference Information | |
Committee | LQE |
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Conference Date | 1997/11/5(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
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Assistant |
Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | On Wafer Fabriction Technology of Different-wavelength Light Sources for WDM Application |
Sub Title (in English) | |
Keyword(1) | WDM |
Keyword(2) | Selective MOVPE |
Keyword(3) | EB lithography |
Keyword(4) | Modulator |
Keyword(5) | DFB lasers |
Keyword(6) | Detuning adjustment |
1st Author's Name | Koji KUDO |
1st Author's Affiliation | Optoelectronics and High Frequency Device Research Laboratories NEC Corporation() |
2nd Author's Name | Masashige ISHIZAKA |
2nd Author's Affiliation | Optoelectronics and High Frequency Device Research Laboratories NEC Corporation |
3rd Author's Name | Tatsuya SASAKI |
3rd Author's Affiliation | Optoelectronics and High Frequency Device Research Laboratories NEC Corporation |
4th Author's Name | Hiroyuki YAMAZAKI |
4th Author's Affiliation | Optoelectronics and High Frequency Device Research Laboratories NEC Corporation |
5th Author's Name | Masayuki YAMAGUCHI |
5th Author's Affiliation | Optoelectronics and High Frequency Device Research Laboratories NEC Corporation |
Date | 1997/11/5 |
Paper # | LQE97-109 |
Volume (vol) | vol.97 |
Number (no) | 364 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |