Presentation | 1997/10/14 Planar-structure Superlattice APDs I. Watanabe, T. Nakata, M. Hayashi, M. Tsuji, K. Makita, K. Taguchi, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Planar-structure InAlAs/InAlGaAs quaternary well superlattice avalanche photodiodes (SL-APDs) are expected for 10Gb/s compact, high-sensitivity, and high-reliability optical receivers. We report the planar SL-APDs with a Ti-implanted guard-ring, which have an advantage for high-reliability and reproducible high-speed response. The fabricated planar SL-APDs exhibited a gain-bandwidth product of 110GHz, a maximum 3-dB bandwidth of 15GHz, a dark current of 0.36μA (@M=10), and a quantum efficiency of 67% (@1.5mm-wavelength). No degradation of dark current was observed after 2000 hours in preliminary aging test at 200℃. These high-speed and high reliability characteristics are promising the planar SL-APDs for 10-Gb/s practical trunk-line uses. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | superlattice / avalanche photodiode / planar / 10-Gb/s / high-reliability |
Paper # | LQE97-67-83 |
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Conference Information | |
Committee | LQE |
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Conference Date | 1997/10/14(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Planar-structure Superlattice APDs |
Sub Title (in English) | |
Keyword(1) | superlattice |
Keyword(2) | avalanche photodiode |
Keyword(3) | planar |
Keyword(4) | 10-Gb/s |
Keyword(5) | high-reliability |
1st Author's Name | I. Watanabe |
1st Author's Affiliation | Optoelectronics and High Frequency Device Res. Labs., NEC Corp.() |
2nd Author's Name | T. Nakata |
2nd Author's Affiliation | Optoelectronics and High Frequency Device Res. Labs., NEC Corp. |
3rd Author's Name | M. Hayashi |
3rd Author's Affiliation | Optoelectronics and High Frequency Device Res. Labs., NEC Corp. |
4th Author's Name | M. Tsuji |
4th Author's Affiliation | Optoelectronics and High Frequency Device Res. Labs., NEC Corp. |
5th Author's Name | K. Makita |
5th Author's Affiliation | Optoelectronics and High Frequency Device Res. Labs., NEC Corp. |
6th Author's Name | K. Taguchi |
6th Author's Affiliation | Optoelectronics and High Frequency Device Res. Labs., NEC Corp. |
Date | 1997/10/14 |
Paper # | LQE97-67-83 |
Volume (vol) | vol.97 |
Number (no) | 313 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |