| Presentation | 1997/10/14 Laser ablative figuring of micro-optics Takahisa Jitsuno, Masahiro Nakatsuka, Yasukazu Izawa, Sadao Nakai, Keiu Tokumura, Hisashi Tamamura, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A new method for the fabrication of micro-lens using ArF excimer laser has been developed. The phase error of transmission wavefront of optical plastic is collected by laser ablation with in-situ measurement using a wavefront detecting interferometer. Glass-plastic hybrid plates of 5cm in diameter are used to correct the phase error, and a flat surface and spherical lens have been fabricated with the phase error better than λ/10. Micro-lenses of 3mm size me also tried to correct the phase. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | laser ablation / micro-lens / laser diode / ArF excimer laser |
| Paper # | LQE97-67-83 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 1997/10/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Laser ablative figuring of micro-optics |
| Sub Title (in English) | |
| Keyword(1) | laser ablation |
| Keyword(2) | micro-lens |
| Keyword(3) | laser diode |
| Keyword(4) | ArF excimer laser |
| 1st Author's Name | Takahisa Jitsuno |
| 1st Author's Affiliation | Institute of Laser Engineering, Osaka University() |
| 2nd Author's Name | Masahiro Nakatsuka |
| 2nd Author's Affiliation | Institute of Laser Engineering, Osaka University |
| 3rd Author's Name | Yasukazu Izawa |
| 3rd Author's Affiliation | Institute of Laser Engineering, Osaka University |
| 4th Author's Name | Sadao Nakai |
| 4th Author's Affiliation | Institute of Laser Engineering, Osaka University |
| 5th Author's Name | Keiu Tokumura |
| 5th Author's Affiliation | NALUX Corporation |
| 6th Author's Name | Hisashi Tamamura |
| 6th Author's Affiliation | Sony Techtoronix Corporation |
| Date | 1997/10/14 |
| Paper # | LQE97-67-83 |
| Volume (vol) | vol.97 |
| Number (no) | 313 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |