| Presentation | 1997/8/22 Development of the Si V-groove substrate for optical fiber communication Ryoji Kaku, Takuya Maezawa, Kiyoshi Takayama, Mitsutoshi Sato, Ayumi Takahashi, Tadashi Harada, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have developed the Si V-groove substrate for surface mounted type optical modules. The most important key word id "The consistency of the low-cost and the high accuracy" in this market. We had the enough accuracy ±0.5μm of the V-groove width and the metal marker pattern, and ～0μm of the relative position between a V-groove center and a metal marker on the production level. We confirmed that the Si V-groove substrate is very useful for low-cost optical modules using passive alignment. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Silicon V-groove / Passive alignment / Low cost / High accuracy / Optical module / Anisotropic etching |
| Paper # | LQE97-57 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 1997/8/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of the Si V-groove substrate for optical fiber communication |
| Sub Title (in English) | |
| Keyword(1) | Silicon V-groove |
| Keyword(2) | Passive alignment |
| Keyword(3) | Low cost |
| Keyword(4) | High accuracy |
| Keyword(5) | Optical module |
| Keyword(6) | Anisotropic etching |
| 1st Author's Name | Ryoji Kaku |
| 1st Author's Affiliation | Japan Aviation Electronics Industry, Limited Central Research Laboratory() |
| 2nd Author's Name | Takuya Maezawa |
| 2nd Author's Affiliation | Japan Aviation Electronics Industry, Limited Central Research Laboratory |
| 3rd Author's Name | Kiyoshi Takayama |
| 3rd Author's Affiliation | Japan Aviation Electronics Industry, Limited Central Research Laboratory |
| 4th Author's Name | Mitsutoshi Sato |
| 4th Author's Affiliation | Japan Aviation Electronics Industry, Limited Central Research Laboratory |
| 5th Author's Name | Ayumi Takahashi |
| 5th Author's Affiliation | Japan Aviation Electronics Industry, Limited Central Research Laboratory |
| 6th Author's Name | Tadashi Harada |
| 6th Author's Affiliation | Japan Aviation Electronics Industry, Limited Optoelectronics Development Division |
| Date | 1997/8/22 |
| Paper # | LQE97-57 |
| Volume (vol) | vol.97 |
| Number (no) | 238 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |