Presentation 1997/8/21
Fabrication, Evaluation, and Analysis of Si/SiO_2 Sub-Micrometer 3D Photonic Crystals
Shojiro KAWAKAMI, Osamu HANAIZUMI, Takashi SATO, Yasuo OHTERA, Takayuki KAWASHIMA,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Sub-micrometer 3D periodic structures that consist of Si/SiO_2 rf-sputtered films are fabricated and optically evaluated. Fabricated 3D structure exhibited a photonic stopband ranged from λ=1.71μm to 2.06μm, which is clearly different from that of 1D periodic structures. We also demonstrate a preliminal analysis on the transmission characteristics of the 3D structures using FDTD(Finite-Difference Time-Domain) method.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) periodic structure / photonic bandgap / photonic crystal / sputter-etching / FDTD method
Paper # LQE97-48
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Conference Information
Committee LQE
Conference Date 1997/8/21(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication, Evaluation, and Analysis of Si/SiO_2 Sub-Micrometer 3D Photonic Crystals
Sub Title (in English)
Keyword(1) periodic structure
Keyword(2) photonic bandgap
Keyword(3) photonic crystal
Keyword(4) sputter-etching
Keyword(5) FDTD method
1st Author's Name Shojiro KAWAKAMI
1st Author's Affiliation Research Institute of Electrical Communication, Tohoku University()
2nd Author's Name Osamu HANAIZUMI
2nd Author's Affiliation Research Institute of Electrical Communication, Tohoku University
3rd Author's Name Takashi SATO
3rd Author's Affiliation Research Institute of Electrical Communication, Tohoku University
4th Author's Name Yasuo OHTERA
4th Author's Affiliation Research Institute of Electrical Communication, Tohoku University
5th Author's Name Takayuki KAWASHIMA
5th Author's Affiliation Research Institute of Electrical Communication, Tohoku University
Date 1997/8/21
Paper # LQE97-48
Volume (vol) vol.97
Number (no) 237
Page pp.pp.-
#Pages 6
Date of Issue