Presentation 1997/6/17
Estimation of the hexagonal to cubic component ratio in GaN using X-ray diffraction measurements and evaluation of HVPE GaN/GaAs layers
Harutoshi Tsuchiya, Kenji Sunaba, Syogo Yonemura, Takashi Suemasu, Fumio Hasegawa,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Cubic GaN can be grown on (001) GaAs, but hexagonal phase is easily introduced in the grown layer. The cubic to hexagonal component ratio of the grown layer was investigated by XRD measurements using the ω scan. The optimum growth condition to obtain cubic-dominant GaN were found to be a thermal cleaning temperature of 600℃ and a V/III ratio of 300. With these growth conditions, a GaN layer whose cubic component was about 80% was grown on (001) GaAs. Furthermore, a strong emission at 377nm without any emission in visible region.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) cubic GaN / (001)GaAs / HVPE / XRD / PL
Paper # LQE97-25
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Conference Information
Committee LQE
Conference Date 1997/6/17(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Estimation of the hexagonal to cubic component ratio in GaN using X-ray diffraction measurements and evaluation of HVPE GaN/GaAs layers
Sub Title (in English)
Keyword(1) cubic GaN
Keyword(2) (001)GaAs
Keyword(3) HVPE
Keyword(4) XRD
Keyword(5) PL
1st Author's Name Harutoshi Tsuchiya
1st Author's Affiliation Insitute of Materials Science, University of Tsukuba()
2nd Author's Name Kenji Sunaba
2nd Author's Affiliation Insitute of Materials Science, University of Tsukuba
3rd Author's Name Syogo Yonemura
3rd Author's Affiliation Insitute of Materials Science, University of Tsukuba
4th Author's Name Takashi Suemasu
4th Author's Affiliation Insitute of Materials Science, University of Tsukuba
5th Author's Name Fumio Hasegawa
5th Author's Affiliation Insitute of Materials Science, University of Tsukuba
Date 1997/6/17
Paper # LQE97-25
Volume (vol) vol.97
Number (no) 100
Page pp.pp.-
#Pages 6
Date of Issue