| Presentation | 1997/6/17 High performance superlattice avalanche photodiodes grown by gas-source MBE K Makita, I Watanabe, M Tsuji, M Hayashi, T Nakata, K Taguchi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | InAlGaAs/InAlAs quaternary well superlattice avalanche photo-diodes(SL-APDs) are suitable for 2.5-10Gb/s-range compact and high sensitivity optical receivers because of their high speed and low dark current characteristics. Here we summarize a research trend of gas source molecular beam epitaxy(GS-MBE) for high performance SL-APD fabrication. By using high controllability GSMBE and optimizing device structures, mesa-type SL-APDs have obtained a gain-bandwidth product of 150GHz and multiplied dark current of 6nA, and high reliability planar-type SL-APDs for 10Gb/s long-distance optical receivers have been recently developed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | gas-source / molecular beam epitaxy / superlattice / avalanche photo-diode |
| Paper # | LQE97-19 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 1997/6/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | High performance superlattice avalanche photodiodes grown by gas-source MBE |
| Sub Title (in English) | |
| Keyword(1) | gas-source |
| Keyword(2) | molecular beam epitaxy |
| Keyword(3) | superlattice |
| Keyword(4) | avalanche photo-diode |
| 1st Author's Name | K Makita |
| 1st Author's Affiliation | Opto-Electronics Res. Labs., NEC Corp() |
| 2nd Author's Name | I Watanabe |
| 2nd Author's Affiliation | Opto-Electronics Res. Labs., NEC Corp |
| 3rd Author's Name | M Tsuji |
| 3rd Author's Affiliation | Opto-Electronics Res. Labs., NEC Corp |
| 4th Author's Name | M Hayashi |
| 4th Author's Affiliation | Opto-Electronics Res. Labs., NEC Corp |
| 5th Author's Name | T Nakata |
| 5th Author's Affiliation | Opto-Electronics Res. Labs., NEC Corp |
| 6th Author's Name | K Taguchi |
| 6th Author's Affiliation | Opto-Electronics Res. Labs., NEC Corp |
| Date | 1997/6/17 |
| Paper # | LQE97-19 |
| Volume (vol) | vol.97 |
| Number (no) | 100 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |