| Presentation | 1997/7/4 Si/SiO_2 3D Sub-Micrometer Periodic Structures : Fabrication and Application Shojiro KAWAKAMI, Hiroyuki SAKAKI, Kazuo SHIRAISHI, Osamu HANAIZUMI, Takashi SATO, Yasuo OHTERA, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We report successful fabrication of 3D sub-micrometer periodic structures composed of two transparent materials for the first time. Various novel optical devices can be realized by using periodicity or photonic bandgap properties of this structure. However, new fabrication technologies must be established and some difficulties and problems need to be overcome. Possibility of some elementary technologies to create new photonic crystal devices are presented. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | 3D periodic structure / photonic bandgap / sputter-etching / photonic crystal device |
| Paper # | LQE97-35 |
| Date of Issue |
| Conference Information | |
| Committee | LQE |
|---|---|
| Conference Date | 1997/7/4(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Si/SiO_2 3D Sub-Micrometer Periodic Structures : Fabrication and Application |
| Sub Title (in English) | |
| Keyword(1) | 3D periodic structure |
| Keyword(2) | photonic bandgap |
| Keyword(3) | sputter-etching |
| Keyword(4) | photonic crystal device |
| 1st Author's Name | Shojiro KAWAKAMI |
| 1st Author's Affiliation | Research Institute of Electrical Communication, Tohoku University() |
| 2nd Author's Name | Hiroyuki SAKAKI |
| 2nd Author's Affiliation | Research Center for Advanced Science and Technology, University of Tokyo |
| 3rd Author's Name | Kazuo SHIRAISHI |
| 3rd Author's Affiliation | Faculty of Engineering, Utsunomiya University |
| 4th Author's Name | Osamu HANAIZUMI |
| 4th Author's Affiliation | Research Institute of Electrical Communication, Tohoku University |
| 5th Author's Name | Takashi SATO |
| 5th Author's Affiliation | Research Institute of Electrical Communication, Tohoku University |
| 6th Author's Name | Yasuo OHTERA |
| 6th Author's Affiliation | Research Institute of Electrical Communication, Tohoku University |
| Date | 1997/7/4 |
| Paper # | LQE97-35 |
| Volume (vol) | vol.97 |
| Number (no) | 153 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |