| Presentation | 1998/6/18 Automatic Laser Drawing System for Optical Waveguide Circuits with Nanometer Precision using Laser Nobuo GOTO, Yasumitsu MIYAZAKI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Precise patterning of optical waveguides is required in fabrication of integrated-optic circuits.In this paper, stage control for laser drawing system with 10nm precision is investigated.The precise control is performed by analog and digital feedback with pulse stages and piezo stages.Mechanical fluctuation and vibration due to pulse drive by stepping motors are compensated by piezo stage.Further, cooperation of pulse and piezo stages makes smooth translation of stage possible. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Integrated-optics / Laser drawing system / Stage control / Feedback control / nanometer |
| Paper # | MW98-26,OPE98-18 |
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| Conference Information | |
| Committee | OPE |
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| Conference Date | 1998/6/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Optoelectronics (OPE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Automatic Laser Drawing System for Optical Waveguide Circuits with Nanometer Precision using Laser |
| Sub Title (in English) | |
| Keyword(1) | Integrated-optics |
| Keyword(2) | Laser drawing system |
| Keyword(3) | Stage control |
| Keyword(4) | Feedback control |
| Keyword(5) | nanometer |
| 1st Author's Name | Nobuo GOTO |
| 1st Author's Affiliation | Toyohashi University of Technology() |
| 2nd Author's Name | Yasumitsu MIYAZAKI |
| 2nd Author's Affiliation | Toyohashi University of Technology |
| Date | 1998/6/18 |
| Paper # | MW98-26,OPE98-18 |
| Volume (vol) | vol.98 |
| Number (no) | 124 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |