Presentation | 1994/12/15 Long-wavelength lasers fabricated on GaAs substrates by anti-phase direct bonding Yae Okuno, Kazuhisa Uomi, Masahiro Aoki, Tsuyoshi Taniwatari, Makoto Suzuki, Masahiko Kondou, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We propose and demonstrate anti-phase direct bonding of GaAs and InP,in which the lattice structure is symmetric at the bonding interface.Cross-sectional observation showed that they bonded at the atomic level and the misfit dislocations were localized at the bonding interface.Crystalline quality of InP layer was not degraded after the bonding procedure.Long-wavelength lasers were fabricated on GaAs using this technique.The lasers performance was almost the same as those fabricated by in-phase direct bonding,in which the lattice order is equivalent to that of hetero- epitaxially grown layers.Moreover,highly reliable operation more than 10^5 hours at 50℃ was confirmed. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | monolithic integration / anti-phase direct bonding / long- wavelength lasers on GaAs / high reliability |
Paper # | OPE94-104 |
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Conference Information | |
Committee | OPE |
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Conference Date | 1994/12/15(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Optoelectronics (OPE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Long-wavelength lasers fabricated on GaAs substrates by anti-phase direct bonding |
Sub Title (in English) | |
Keyword(1) | monolithic integration |
Keyword(2) | anti-phase direct bonding |
Keyword(3) | long- wavelength lasers on GaAs |
Keyword(4) | high reliability |
1st Author's Name | Yae Okuno |
1st Author's Affiliation | Central Research Laboratory,Hitachi,Ltd.() |
2nd Author's Name | Kazuhisa Uomi |
2nd Author's Affiliation | Central Research Laboratory,Hitachi,Ltd. |
3rd Author's Name | Masahiro Aoki |
3rd Author's Affiliation | Central Research Laboratory,Hitachi,Ltd. |
4th Author's Name | Tsuyoshi Taniwatari |
4th Author's Affiliation | Fiberoptics Divison,Hitachi,Ltd |
5th Author's Name | Makoto Suzuki |
5th Author's Affiliation | Central Research Laboratory Hitachi,Ltd |
6th Author's Name | Masahiko Kondou |
6th Author's Affiliation | Central Research Laboratory Hitachi,Ltd |
Date | 1994/12/15 |
Paper # | OPE94-104 |
Volume (vol) | vol.94 |
Number (no) | 397 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |