Presentation 1994/12/15
Long-wavelength lasers fabricated on GaAs substrates by anti-phase direct bonding
Yae Okuno, Kazuhisa Uomi, Masahiro Aoki, Tsuyoshi Taniwatari, Makoto Suzuki, Masahiko Kondou,
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Abstract(in English) We propose and demonstrate anti-phase direct bonding of GaAs and InP,in which the lattice structure is symmetric at the bonding interface.Cross-sectional observation showed that they bonded at the atomic level and the misfit dislocations were localized at the bonding interface.Crystalline quality of InP layer was not degraded after the bonding procedure.Long-wavelength lasers were fabricated on GaAs using this technique.The lasers performance was almost the same as those fabricated by in-phase direct bonding,in which the lattice order is equivalent to that of hetero- epitaxially grown layers.Moreover,highly reliable operation more than 10^5 hours at 50℃ was confirmed.
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Keyword(in English) monolithic integration / anti-phase direct bonding / long- wavelength lasers on GaAs / high reliability
Paper # OPE94-104
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Committee OPE
Conference Date 1994/12/15(1days)
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Registration To Optoelectronics (OPE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Long-wavelength lasers fabricated on GaAs substrates by anti-phase direct bonding
Sub Title (in English)
Keyword(1) monolithic integration
Keyword(2) anti-phase direct bonding
Keyword(3) long- wavelength lasers on GaAs
Keyword(4) high reliability
1st Author's Name Yae Okuno
1st Author's Affiliation Central Research Laboratory,Hitachi,Ltd.()
2nd Author's Name Kazuhisa Uomi
2nd Author's Affiliation Central Research Laboratory,Hitachi,Ltd.
3rd Author's Name Masahiro Aoki
3rd Author's Affiliation Central Research Laboratory,Hitachi,Ltd.
4th Author's Name Tsuyoshi Taniwatari
4th Author's Affiliation Fiberoptics Divison,Hitachi,Ltd
5th Author's Name Makoto Suzuki
5th Author's Affiliation Central Research Laboratory Hitachi,Ltd
6th Author's Name Masahiko Kondou
6th Author's Affiliation Central Research Laboratory Hitachi,Ltd
Date 1994/12/15
Paper # OPE94-104
Volume (vol) vol.94
Number (no) 397
Page pp.pp.-
#Pages 6
Date of Issue