| Presentation | 2000/1/18 The position of a simulator for a production system Mamoru Iguchi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A production system simulator is indispensable for a management of a semiconductor diffusion line to keep the high productivity. This paper presents the position of a production system simulator for a management and a control of a semiconductor diffusion line. And it is described that a simulation model should take account of some kinds of event and need to keep restrictions and premises. In addition, it mentions some problems awaiting solution to aim at the development of a production system simulation technology. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Event driven / Simulation / Production system / Semiconductor / Diffusion process |
| Paper # | CST99-61 |
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| Conference Information | |
| Committee | CST |
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| Conference Date | 2000/1/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Concurrent System Technology (CST) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | The position of a simulator for a production system |
| Sub Title (in English) | |
| Keyword(1) | Event driven |
| Keyword(2) | Simulation |
| Keyword(3) | Production system |
| Keyword(4) | Semiconductor |
| Keyword(5) | Diffusion process |
| 1st Author's Name | Mamoru Iguchi |
| 1st Author's Affiliation | C&C Media Research Laboratories, NEC() |
| Date | 2000/1/18 |
| Paper # | CST99-61 |
| Volume (vol) | vol.99 |
| Number (no) | 539 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |