| Presentation | 1998/10/26 Aluminum hollow fibers for delivery of excimer laser light Yuji MATSUURA, Mitsunobu MIYAGI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Hollow fibers with an internal aluminum coating are developed for delivery of high-powered excimer laser light pulses. The aluminum film with a mirror surface is deposited on the inside of glass capillary tubing by using metal-organic chemical vapor deposition (MOCVD) technique. The fiber shows low-loss property for ArF -and KrF-excimer laser light. The straight losses of the fiber with 1.0mm-bore are 1.0dB/m for ArF and 0.4dB/m for KrF lasers. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Excimer lasers / UV fibers / hollow fibers |
| Paper # | EE98-43,OFT98-36 |
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| Conference Information | |
| Committee | OFT |
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| Conference Date | 1998/10/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Optical Fiber Technology (OFT) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Aluminum hollow fibers for delivery of excimer laser light |
| Sub Title (in English) | |
| Keyword(1) | Excimer lasers |
| Keyword(2) | UV fibers |
| Keyword(3) | hollow fibers |
| 1st Author's Name | Yuji MATSUURA |
| 1st Author's Affiliation | Graduate School of Engineering, Tohoku University() |
| 2nd Author's Name | Mitsunobu MIYAGI |
| 2nd Author's Affiliation | Graduate School of Engineering, Tohoku University |
| Date | 1998/10/26 |
| Paper # | EE98-43,OFT98-36 |
| Volume (vol) | vol.98 |
| Number (no) | 367 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |