Presentation 2003/12/13
GaInAsP/InP Long Wavelength Quantum-Wire Lasers
Shigehisa ARAI, Hideki YAGI, Takuya SANO, Kazuya OHIRA, Takeo MARUYAMA, Anisul HAQUE, Plumwongrot DHANORM, Shigeo TAMURA,
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Abstract(in English) We report the structural properties and losing characteristics of GaInAsP/InP multiple-quantum-wire lasers fabricated by electron beam lithography, CH_4/H_2-reactive ion etching and 2-step organometallic vapor-phase-epitaxial growth processes. Good size uniformity of multiple-quantum-wire structures (wire widths of 18 nm and 27 nm in a period of 80 nm) was obtained with standard deviations of less than ±2 nm. We experimentally demonstrated that low-damage etched/regrown interfaces of quantum-wire structures can be realized by using a partially strain-compensated quantum-well structure. Lasing properties of 5-quantum-well wirelike lasers (wire width of 43 nm in a period of 100 nm) superior to those of quantum-film lasers prepared on the same initial wafer due to a volume effect were found at temperatures up to 85℃. Finally, room temperature (RT)-continuous wave (CW) operation of multiple-quantum-wire lasers (wire width of 23 nm in a period of 80 nm, 5-stacked quantum-wires) was achieved, and the good reliable operation of this quantum-wire laser was shown for the first time in lifetime measurement under the RT-CW condition.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Quantum-Wire Laser / GaInAsP/InP / Strain-Compensated Quantum-Well structure / CH_4/H_2-RIE / OMVPE Regrowth
Paper # OPE2003-220,LQE2003-157
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Conference Information
Committee LQE
Conference Date 2003/12/13(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) GaInAsP/InP Long Wavelength Quantum-Wire Lasers
Sub Title (in English)
Keyword(1) Quantum-Wire Laser
Keyword(2) GaInAsP/InP
Keyword(3) Strain-Compensated Quantum-Well structure
Keyword(4) CH_4/H_2-RIE
Keyword(5) OMVPE Regrowth
1st Author's Name Shigehisa ARAI
1st Author's Affiliation Research Center for Quantum Effect Electronics, Tokyo Institute of Technology:JST-CREST Kawaguchi Center Building()
2nd Author's Name Hideki YAGI
2nd Author's Affiliation Research Center for Quantum Effect Electronics, Tokyo Institute of Technology
3rd Author's Name Takuya SANO
3rd Author's Affiliation Research Center for Quantum Effect Electronics, Tokyo Institute of Technology
4th Author's Name Kazuya OHIRA
4th Author's Affiliation Research Center for Quantum Effect Electronics, Tokyo Institute of Technology
5th Author's Name Takeo MARUYAMA
5th Author's Affiliation Research Center for Quantum Effect Electronics, Tokyo Institute of Technology:JST-CREST Kawaguchi Center Building
6th Author's Name Anisul HAQUE
6th Author's Affiliation Research Center for Quantum Effect Electronics, Tokyo Institute of Technology:JST-CREST Kawaguchi Center Building
7th Author's Name Plumwongrot DHANORM
7th Author's Affiliation Research Center for Quantum Effect Electronics, Tokyo Institute of Technology
8th Author's Name Shigeo TAMURA
8th Author's Affiliation Research Center for Quantum Effect Electronics, Tokyo Institute of Technology:JST-CREST Kawaguchi Center Building
Date 2003/12/13
Paper # OPE2003-220,LQE2003-157
Volume (vol) vol.103
Number (no) 528
Page pp.pp.-
#Pages 4
Date of Issue