| Presentation | 2003/9/25 Control of height and density of GaN nano-structure and its antireflection and enhanced transmission properties Hiroki YAMAJI, Yuusuke TERADA, Harumasa YOSHIDA, Hideto MIYAKE, Kazumasa HIRAMATSU, Toshie YAGUCHI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A self-organized GaN nanotip structure, which was nanoscale tip-shaped pillar, was fabricated on a GaN surface by reactive ion etching (RIE) using chlorine plasma. The nanotip structure with periods smaller than wavelength of light can provide antireflection and enhanced transmission effects from the ultraviolet (UV) to the visible region (300nm ～ 900nm). In this study, we have found that the height and the density of the nanotip structure can be controlled from 0.1μm to 2.0μm and from 10^9cm^<-2> to 10^<11>cm^<-2> by changing etching condition, respectively. The transmittance of the nanotip structure with the density of 6.2×10^<10>cm^<-2> improved more than 10% in the UV region compared with that with the density of 2.2×10^<10>cm^<-2>. These excellent optical properties of the nanotip structure are expected to improve the performances of light-emitting and photo-detective devices. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GaN / RIE / nanotip structure / antireflection / reflectance / transmittance |
| Paper # | LQE2003-50 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2003/9/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Control of height and density of GaN nano-structure and its antireflection and enhanced transmission properties |
| Sub Title (in English) | |
| Keyword(1) | GaN |
| Keyword(2) | RIE |
| Keyword(3) | nanotip structure |
| Keyword(4) | antireflection |
| Keyword(5) | reflectance |
| Keyword(6) | transmittance |
| 1st Author's Name | Hiroki YAMAJI |
| 1st Author's Affiliation | Faculty of Engineering, Mie University() |
| 2nd Author's Name | Yuusuke TERADA |
| 2nd Author's Affiliation | Faculty of Engineering, Mie University |
| 3rd Author's Name | Harumasa YOSHIDA |
| 3rd Author's Affiliation | Faculty of Engineering, Mie University |
| 4th Author's Name | Hideto MIYAKE |
| 4th Author's Affiliation | Faculty of Engineering, Mie University |
| 5th Author's Name | Kazumasa HIRAMATSU |
| 5th Author's Affiliation | Faculty of Engineering, Mie University |
| 6th Author's Name | Toshie YAGUCHI |
| 6th Author's Affiliation | Hitachi Science Systems, Ltd. |
| Date | 2003/9/25 |
| Paper # | LQE2003-50 |
| Volume (vol) | vol.103 |
| Number (no) | 345 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |