| Presentation | 2002/6/8 Fabrication and characterization of AlGaN-Based Resonant Cavity-Enhanced Ultraviolet Photodetectors Masao YONEMARU, Akihiko KIKUCHI, Katsumi KISHINO, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Resonant cavity-enhanced (RCE) photodetector (PD) is achieved a high responsivity and excellent wavelength selectivity for a thin absorption layer. In this investigation, we have fabricated AlGaN-based RCE ultraviolet (UV) PD by rf-plasma-assisted molecular beam epitaxy (RF-MBE). We have successfully improved the responsivity of RCE-UV-PD by grown on sapphire substrate without metalorganic chemical vapor deposition (MOCVD)-GaN template. Dark current was 66pA at 5V bias voltage. We observed clear resonant detection peaks by resonant cavity effect. Peak responsivities were 1.5A/W at 357nm and 1.2A/W at 364nm with 9V bias voltage, for a thin absorption layer of 40nm. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | resonant cavity-enhanced photodetector / ultraviolet-ray / photoconductor / GaN / AlN |
| Paper # | LQE2002-73 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2002/6/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication and characterization of AlGaN-Based Resonant Cavity-Enhanced Ultraviolet Photodetectors |
| Sub Title (in English) | |
| Keyword(1) | resonant cavity-enhanced photodetector |
| Keyword(2) | ultraviolet-ray |
| Keyword(3) | photoconductor |
| Keyword(4) | GaN |
| Keyword(5) | AlN |
| 1st Author's Name | Masao YONEMARU |
| 1st Author's Affiliation | Department of Electrical and Electronics Engineering, Sophia University() |
| 2nd Author's Name | Akihiko KIKUCHI |
| 2nd Author's Affiliation | Department of Electrical and Electronics Engineering, Sophia University |
| 3rd Author's Name | Katsumi KISHINO |
| 3rd Author's Affiliation | Department of Electrical and Electronics Engineering, Sophia University |
| Date | 2002/6/8 |
| Paper # | LQE2002-73 |
| Volume (vol) | vol.102 |
| Number (no) | 119 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |