| Presentation | 2002/6/8 Formation of GaN self-organized nanotips and its field emission Yuusuke Terada, Tatsuhiro Urushido, Harumasa Yoshida, Hideto Miyake, Kazumasa Hiramatu, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Formation of GaN self-organized nanotips by using reactive ion etching (RIE) and its field emission were characterized. The nanotips fabricated on the GaN substrate grown by epitaxial lateral overgrowth (ELO) were uniformly on the GaN layer, which reveals that nanotips are not dependent on threading dislocations. It was found that the height of the nanotips increases by increasing etching time. In etching time of 4 min, the height of the nanotips was about 1μm. Microscopic current I_FC by field emission from the nanotips was 0.2μA(73mA/cm^2) on applied voltage of 1500 V. The stability current of 12 nA was observed at an applied voltage 1200 V for 1 hour. It confirmed that the application for cold cathode field emitter for GaN nanotips is promise. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GaN / RIE / Cl_2 plasma / nanotips / field emission |
| Paper # | LQE2002-71 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2002/6/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Formation of GaN self-organized nanotips and its field emission |
| Sub Title (in English) | |
| Keyword(1) | GaN |
| Keyword(2) | RIE |
| Keyword(3) | Cl_2 plasma |
| Keyword(4) | nanotips |
| Keyword(5) | field emission |
| 1st Author's Name | Yuusuke Terada |
| 1st Author's Affiliation | Mie University() |
| 2nd Author's Name | Tatsuhiro Urushido |
| 2nd Author's Affiliation | Mie University |
| 3rd Author's Name | Harumasa Yoshida |
| 3rd Author's Affiliation | Mie University |
| 4th Author's Name | Hideto Miyake |
| 4th Author's Affiliation | Mie University |
| 5th Author's Name | Kazumasa Hiramatu |
| 5th Author's Affiliation | Mie University |
| Date | 2002/6/8 |
| Paper # | LQE2002-71 |
| Volume (vol) | vol.102 |
| Number (no) | 119 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |