Presentation | 2002/6/6 Influence of Ambient Hydrogen in InGaN multiple quantum well structure Akinori Ubukata, Hiroki Tokunaga, Yoshiki Yano, Akira Yamaguchi, Toshiaki Yamazaki, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have investigated a growth condition of InGaN/GaN multiple quantum well structure. The epitaxial layers were grown on sapphire using an atmospheric horizontal MOVPE system with a 6 inch diameter wafer platen. 'With ambient hydrogen rich as a carrier gas in the growth of GaN films, asymmetrical reflection profile of X-ray rocking curve became narrow. By applying same growth condition to the GaN barriers in InGaN/GaN multi quantum well (MQW) structure, room temperature photoluminescence intensity was improved approximately three times as that for InGaN/GaN MQW structures grown with only nitrogen carrier gas. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | InGaN / GaN / multi quantum well / MOVPE / multi wafer reactor |
Paper # | LQE2002-33 |
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Conference Information | |
Committee | LQE |
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Conference Date | 2002/6/6(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Influence of Ambient Hydrogen in InGaN multiple quantum well structure |
Sub Title (in English) | |
Keyword(1) | InGaN |
Keyword(2) | GaN |
Keyword(3) | multi quantum well |
Keyword(4) | MOVPE |
Keyword(5) | multi wafer reactor |
1st Author's Name | Akinori Ubukata |
1st Author's Affiliation | Compound Semiconductor Project, NIPPON SANSO Corporation() |
2nd Author's Name | Hiroki Tokunaga |
2nd Author's Affiliation | Compound Semiconductor Project, NIPPON SANSO Corporation |
3rd Author's Name | Yoshiki Yano |
3rd Author's Affiliation | Compound Semiconductor Project, NIPPON SANSO Corporation |
4th Author's Name | Akira Yamaguchi |
4th Author's Affiliation | Compound Semiconductor Project, NIPPON SANSO Corporation |
5th Author's Name | Toshiaki Yamazaki |
5th Author's Affiliation | Compound Semiconductor Project, NIPPON SANSO Corporation |
Date | 2002/6/6 |
Paper # | LQE2002-33 |
Volume (vol) | vol.102 |
Number (no) | 117 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |