| Presentation | 2002/6/6 Growth Pressure Dependence of the Crystallinity of MOCVD Grown GaN Thin Films S-W. Kim, T. Shibata, T. Sugimoto, T. Yamada, K. Haga, T. Suzuki, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We discussed the growth pressure dependence of the crystallinity of MOCVD grown GaN thin films between the growth pressure of lOOTorr and 300Torr. As a result, it was found that the lower the growth pressure was, the smaller the size of islands became and the higher the density of threading dislocation became at the same time, and vice versa. The surface resistivity also depended on the growth pressure, i.e. the surface resistivity of GaN thin film grown under lOOTorr was about five orders of magnitude higher than that grown under 300Torr. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GaN / MOCVD / Growth pressure / Threading Dislocations / Surface Resistivity |
| Paper # | LQE2002-31 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2002/6/6(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Growth Pressure Dependence of the Crystallinity of MOCVD Grown GaN Thin Films |
| Sub Title (in English) | |
| Keyword(1) | GaN |
| Keyword(2) | MOCVD |
| Keyword(3) | Growth pressure |
| Keyword(4) | Threading Dislocations |
| Keyword(5) | Surface Resistivity |
| 1st Author's Name | S-W. Kim |
| 1st Author's Affiliation | Nippon Institute of Technology() |
| 2nd Author's Name | T. Shibata |
| 2nd Author's Affiliation | Nippon Institute of Technology |
| 3rd Author's Name | T. Sugimoto |
| 3rd Author's Affiliation | Nippon Institute of Technology |
| 4th Author's Name | T. Yamada |
| 4th Author's Affiliation | Nippon Institute of Technology:Chichibu Fuji Co., Ltd |
| 5th Author's Name | K. Haga |
| 5th Author's Affiliation | Nippon Institute of Technology:Chichibu Fuji Co., Ltd |
| 6th Author's Name | T. Suzuki |
| 6th Author's Affiliation | Nippon Institute of Technology |
| Date | 2002/6/6 |
| Paper # | LQE2002-31 |
| Volume (vol) | vol.102 |
| Number (no) | 117 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |