| Presentation | 2002/6/6 Study on Stress Distributions in Air-Bridged Lateral Epitaxial Grown GaN with Low Dislocation Density Akihiko ISHIBASHI, Gaku SUGAHARA, Yasutoshi KAWAGUCHI, Toshiya YOKOGAWA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The deformations and the stress distributions in air-bridged lateral epitaxial grown (ABLEG) GaN films with low dislocation densities have been studied by atomic force microscopy (AFM), finite element method (FEM) analysis, and micro-Raman spectroscopy. The wing regions of the ABLEG-GaN films slightly tilt, and the direction of the wing tilt changes with coalescence of the wings. After coalescence of the wings, the tilt angle decreases with increase of the film thickness. By FEM analysis and Raman spectroscopy, it has been found that the deformation of the wings originates from the distributions of the thermal stress due to large mismatch of the thermal expansion coefficient (α_GaN<α_sapphire). |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GaN / air-bridge / dislocation / thermal stress distribution / micro-Raman |
| Paper # | LQE2002-21 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2002/6/6(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study on Stress Distributions in Air-Bridged Lateral Epitaxial Grown GaN with Low Dislocation Density |
| Sub Title (in English) | |
| Keyword(1) | GaN |
| Keyword(2) | air-bridge |
| Keyword(3) | dislocation |
| Keyword(4) | thermal stress distribution |
| Keyword(5) | micro-Raman |
| 1st Author's Name | Akihiko ISHIBASHI |
| 1st Author's Affiliation | Advanced Technology Research Laboratories, Matsushita Electric Industrial Co., Ltd.() |
| 2nd Author's Name | Gaku SUGAHARA |
| 2nd Author's Affiliation | Advanced Technology Research Laboratories, Matsushita Electric Industrial Co., Ltd. |
| 3rd Author's Name | Yasutoshi KAWAGUCHI |
| 3rd Author's Affiliation | Advanced Technology Research Laboratories, Matsushita Electric Industrial Co., Ltd. |
| 4th Author's Name | Toshiya YOKOGAWA |
| 4th Author's Affiliation | Advanced Technology Research Laboratories, Matsushita Electric Industrial Co., Ltd. |
| Date | 2002/6/6 |
| Paper # | LQE2002-21 |
| Volume (vol) | vol.102 |
| Number (no) | 117 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |