| Presentation | 2004/4/16 Fabrication of high index contrast waveguide with buried air cladding and miniaturization of microring resonator Masashi OGATA, Hideyuki YODA, Yasuo KOKUBUN, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | To realize a densely integrated optical circuit, we have developed a process to bury high index contrast waveguides with perfectly flat upper cladding. In this process, however, their radiation loss of microring resonator increases due to the decrease of index contrast. To solve this problem, in this study we propose a buried air (vacuum) structure and develop the process to realize this structure using RF sputtering deposition. We fabricated some microring resonators using this process and successfully observed a clear filter response by the device with the ring radius of 5μm In addition, we fabricated two different types of structures, one is buried by SiO_2 cladding and the other has buried air (vacuum) cladding structure, and compared the filter responses. Then a narrow bandwidth of drop port response and a deep drop of through port response were observed by the device with buried air (vacuum) cladding structure, and the propagation loss in the microring was evaluated to be reduced to one tenth of that of the conventional buried structure. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Optical waveguide / High index contrast / Microring resonator / Buried waveguide / Dense integration |
| Paper # | R2004-3,CPM2004-3,OPE2004-3 |
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| Conference Information | |
| Committee | OPE |
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| Conference Date | 2004/4/16(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Optoelectronics (OPE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of high index contrast waveguide with buried air cladding and miniaturization of microring resonator |
| Sub Title (in English) | |
| Keyword(1) | Optical waveguide |
| Keyword(2) | High index contrast |
| Keyword(3) | Microring resonator |
| Keyword(4) | Buried waveguide |
| Keyword(5) | Dense integration |
| 1st Author's Name | Masashi OGATA |
| 1st Author's Affiliation | Graduate School of Engineering, Yokohama National University() |
| 2nd Author's Name | Hideyuki YODA |
| 2nd Author's Affiliation | Graduate School of Engineering, Yokohama National University |
| 3rd Author's Name | Yasuo KOKUBUN |
| 3rd Author's Affiliation | Graduate School of Engineering, Yokohama National University |
| Date | 2004/4/16 |
| Paper # | R2004-3,CPM2004-3,OPE2004-3 |
| Volume (vol) | vol.104 |
| Number (no) | 28 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |