| Presentation | 2003/5/16 Center wavelength trimming of vertically coupled microring resonator filter by direct UV irradiation to SiN ring core Hirofumi HAEIWA, Toshiki NAGANAWA, Yasuo KOKUBUN, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | For the precise fabrication of vertically coupled microring resonator (VC-MRR) filler, we have previously demonstrated a center wavelength trimming by a direct UV irradiation to the Ta_2O_5 (30mol%)-SiN_2 (n= 1,784 @λ=1 55,um)ring core. However, since the shift of center wavelength was -0.65nm, it's not wide enough lo compensate for the fabrication error. To solve this problem, we investigated the UV sensitivity of SiN as the core material of ultra-high index contrast waveguide, and found mat the UV-induced index shange is as large as -1.3 X10^<-2> . Thus, we fabricated a VC-MRR filter with SiN ring core, and irradiated UV light to the ring core. As the result, we have demonstrated a wide range UV trimming of the center wavelength (-12.1nm) and the long term stability over 1200 hours after the UV irradiation. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | integrated optics / waveguide device / microring resonator / trimming / UV irradiation / silicon nitride |
| Paper # | OPE2003-16 |
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| Committee | OPE |
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| Conference Date | 2003/5/16(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Optoelectronics (OPE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Center wavelength trimming of vertically coupled microring resonator filter by direct UV irradiation to SiN ring core |
| Sub Title (in English) | |
| Keyword(1) | integrated optics |
| Keyword(2) | waveguide device |
| Keyword(3) | microring resonator |
| Keyword(4) | trimming |
| Keyword(5) | UV irradiation |
| Keyword(6) | silicon nitride |
| 1st Author's Name | Hirofumi HAEIWA |
| 1st Author's Affiliation | Yokohama National University, Graduate School of Engineering,Dept. of Electrical and Computer Engineering : Presently with Sumitomo Electric Industries, Ltd,() |
| 2nd Author's Name | Toshiki NAGANAWA |
| 2nd Author's Affiliation | Yokohama National University, Graduate School of Engineering,Dept. of Electrical and Computer EngineeringDept. Of Electrical and Computer Engineering |
| 3rd Author's Name | Yasuo KOKUBUN |
| 3rd Author's Affiliation | Yokohama National University, Faculty of Engineering,Dept. of Electrical and Computer Engineering |
| Date | 2003/5/16 |
| Paper # | OPE2003-16 |
| Volume (vol) | vol.103 |
| Number (no) | 80 |
| Page | pp.pp.- |
| #Pages | 6 |
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