| Presentation | 2003/8/21 3-D MEMS optical switch fabric Joji YAMAGUCHI, Tsuyoshi YAMAMOTO, Akira SHIMIZU, Nobuyuki TAKEUCHI, Eiji HIGURASHI, Renshi SAWADA, Yuji UENISHI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A large-scale 3-D MEMS optical switch, consisting of MEMS two-axis tilt mirror array and free-space optics, is described. The MEMS tilt mirrors that constitute the array are made of single-crystal silicon supported by high-aspect-ratio torsion springs. The collimator arrays are comprised of optical fiber arrays and polymer microlens arrays; the optical fiber arrays consist of optical fibers with micro ferrules aligned in a polymer substrate having an array of precisely-aligned holes. The prototype module with 100ch optical fiber I/O has a low insertion loss of 4.0dB and a switching time of 3 ms. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | 3-D MEMS optical switch / OXC / Optical cross-connect |
| Paper # | EMD2003-27,CPM2003-72,OPE2003-109,LQE2003-28 |
| Date of Issue |
| Conference Information | |
| Committee | OPE |
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| Conference Date | 2003/8/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Optoelectronics (OPE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | 3-D MEMS optical switch fabric |
| Sub Title (in English) | |
| Keyword(1) | 3-D MEMS optical switch |
| Keyword(2) | OXC |
| Keyword(3) | Optical cross-connect |
| 1st Author's Name | Joji YAMAGUCHI |
| 1st Author's Affiliation | NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corp.() |
| 2nd Author's Name | Tsuyoshi YAMAMOTO |
| 2nd Author's Affiliation | NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corp. |
| 3rd Author's Name | Akira SHIMIZU |
| 3rd Author's Affiliation | NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corp. |
| 4th Author's Name | Nobuyuki TAKEUCHI |
| 4th Author's Affiliation | NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corp. |
| 5th Author's Name | Eiji HIGURASHI |
| 5th Author's Affiliation | NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corp. |
| 6th Author's Name | Renshi SAWADA |
| 6th Author's Affiliation | NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corp. |
| 7th Author's Name | Yuji UENISHI |
| 7th Author's Affiliation | NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corp. |
| Date | 2003/8/21 |
| Paper # | EMD2003-27,CPM2003-72,OPE2003-109,LQE2003-28 |
| Volume (vol) | vol.103 |
| Number (no) | 271 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |