| Presentation | 2002/12/11 3-D MEMS Optical Switch Using a Comb-driven Micromirror Array Ippei SAWAKI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | An 80-channel 3D-MEMS low drive-voltage optical switch module has been developed. A dual-axis vertical comb-drive MEMS micromirror with V-shaped torsion bars enabled 5-degrees rotation by applying 60-volts to it. Insertion loss of less than 5 dB and optical switching time of 1ms was obtained using a roof-type folding mirror configuration and a control circuit with a digital filer and block drive control. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | OXC / Optical switch / MEMS / Micro mirror / Comb electrode |
| Paper # | OPE2002-112 |
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| Conference Information | |
| Committee | OPE |
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| Conference Date | 2002/12/11(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Optoelectronics (OPE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | 3-D MEMS Optical Switch Using a Comb-driven Micromirror Array |
| Sub Title (in English) | |
| Keyword(1) | OXC |
| Keyword(2) | Optical switch |
| Keyword(3) | MEMS |
| Keyword(4) | Micro mirror |
| Keyword(5) | Comb electrode |
| 1st Author's Name | Ippei SAWAKI |
| 1st Author's Affiliation | Media Devices Laboratory, Peripheral Systems Laboratory, Fujitsu Laboratories Ltd.() |
| Date | 2002/12/11 |
| Paper # | OPE2002-112 |
| Volume (vol) | vol.102 |
| Number (no) | 521 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |