| Presentation | 2004/8/20 Large UV sensitivity refractive index of SiON film and its application to center wavelength trimming of microring resonator filter Satoshi UENO, Toshiki NAGANAWA, Yasuo KOKUBUN, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have demonstrated a vertically coupled microring resonator (VCMRR) filter as an Add/Drop wavelength filter. This waveguide filter has many advantages such as functionality, compactness, and the possibility of dense integration resulting from the cross grid configuration. However, the accuracy of center wavelength was not satisfactory high enough for the DWDM systems. Thus, a UV trimming technique using SiN(n=2.01@λ=1.55μm) ring core has been previously developed. Although a wide range center wavelength trimming of-12.1nm and the long term stability of center wavelength were obtained, the core size required for the single mode propagation was too small for the fabrication using the photolithography process. Therefore in this study, we introduced SiON as the microring core to relax the single mode condition of core size. We discovered a large UV sensitivity of SiON film formed by PECVD method, and a wide range UV trimming of microring resonator over -10.5nm was demonstrated using this phenomenon. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | microring resonator / UV sensitivity / trimming / SiON |
| Paper # | EMD2004-50,CPM2004-76,OPE2004-133,LQE2004-48 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 2004/8/20(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Large UV sensitivity refractive index of SiON film and its application to center wavelength trimming of microring resonator filter |
| Sub Title (in English) | |
| Keyword(1) | microring resonator |
| Keyword(2) | UV sensitivity |
| Keyword(3) | trimming |
| Keyword(4) | SiON |
| 1st Author's Name | Satoshi UENO |
| 1st Author's Affiliation | Yokohama National University, Graduate School of Engineering, Dept. of Electrical and Computer Engineering() |
| 2nd Author's Name | Toshiki NAGANAWA |
| 2nd Author's Affiliation | Yokohama National University, Graduate School of Engineering, Dept. of Electrical and Computer Engineering |
| 3rd Author's Name | Yasuo KOKUBUN |
| 3rd Author's Affiliation | Yokohama National University, Graduate School of Engineering, Dept. of Electrical and Computer Engineering |
| Date | 2004/8/20 |
| Paper # | EMD2004-50,CPM2004-76,OPE2004-133,LQE2004-48 |
| Volume (vol) | vol.104 |
| Number (no) | 264 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |