Presentation 2004/8/19
Board-level Optical Interconnection Using Polymeric Waveguide
Tsuyoshi SHIODA,
PDF Download Page PDF download Page Link
Abstract(in Japanese) (See Japanese page)
Abstract(in English) The main issue for realization of board-level optical interconnection is development of an easy optical coupling technique including a 90 degree optical path conversion. A micro-mirror is necessary for sending or receiving signals everywhere in a waveguide. We demonstrated the micro-mirror formed using an excimer laser processing for a fluorinated polyimide waveguide film. The tilted excimer laser irradiation to a waveguide core formed micro-mirrors with an angle of 45±1 degree. The micro-mirror had a cylindrical shape and exhibited a lens effect as a concave mirror. The micro-mirror exhibited a low reflection loss of approximately 0.6dB at the wavelength of 850nm.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) fluorinated polyimide waveguide / excimer laser processing / micro-mirror / concave mirror / reflection loss
Paper # EMD2004-35,CPM2004-61,OPE2004-118,LQE2004-33
Date of Issue

Conference Information
Committee EMD
Conference Date 2004/8/19(1days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Vice Chair

Paper Information
Registration To Electromechanical Devices (EMD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Board-level Optical Interconnection Using Polymeric Waveguide
Sub Title (in English)
Keyword(1) fluorinated polyimide waveguide
Keyword(2) excimer laser processing
Keyword(3) micro-mirror
Keyword(4) concave mirror
Keyword(5) reflection loss
1st Author's Name Tsuyoshi SHIODA
1st Author's Affiliation Electronic & Engineered Materials Laboratory, Mitsui Chemical Inc.()
Date 2004/8/19
Paper # EMD2004-35,CPM2004-61,OPE2004-118,LQE2004-33
Volume (vol) vol.104
Number (no) 263
Page pp.pp.-
#Pages 5
Date of Issue