Presentation	2004/8/19 Board-level Optical Interconnection Using Polymeric Waveguide Tsuyoshi SHIODA,
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Abstract(in Japanese)	(See Japanese page)
Abstract(in English)	The main issue for realization of board-level optical interconnection is development of an easy optical coupling technique including a 90 degree optical path conversion. A micro-mirror is necessary for sending or receiving signals everywhere in a waveguide. We demonstrated the micro-mirror formed using an excimer laser processing for a fluorinated polyimide waveguide film. The tilted excimer laser irradiation to a waveguide core formed micro-mirrors with an angle of 45±1 degree. The micro-mirror had a cylindrical shape and exhibited a lens effect as a concave mirror. The micro-mirror exhibited a low reflection loss of approximately 0.6dB at the wavelength of 850nm.
Keyword(in Japanese)	(See Japanese page)
Keyword(in English)	fluorinated polyimide waveguide / excimer laser processing / micro-mirror / concave mirror / reflection loss
Paper #	EMD2004-35,CPM2004-61,OPE2004-118,LQE2004-33
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Conference Information
Committee	EMD
Conference Date	2004/8/19(1days)
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Paper Information
Registration To	Electromechanical Devices (EMD)
Language	JPN
Title (in Japanese)	(See Japanese page)
Sub Title (in Japanese)	(See Japanese page)
Title (in English)	Board-level Optical Interconnection Using Polymeric Waveguide
Sub Title (in English)
Keyword(1)	fluorinated polyimide waveguide
Keyword(2)	excimer laser processing
Keyword(3)	micro-mirror
Keyword(4)	concave mirror
Keyword(5)	reflection loss
1st Author's Name	Tsuyoshi SHIODA
1st Author's Affiliation	Electronic & Engineered Materials Laboratory, Mitsui Chemical Inc.()
Date	2004/8/19
Paper #	EMD2004-35,CPM2004-61,OPE2004-118,LQE2004-33
Volume (vol)	vol.104
Number (no)	263
Page	pp.pp.-
#Pages	5
Date of Issue