| Presentation | 2003/5/9 Industrial microfocus CT technology and Its application for high-density LSI Akira HIRAKIMOTO, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In the semiconductor related industries, micro focus x-ray computed tomographic systems are now being recognized as powerful quality control tools. Especially, the importance of three-dimensional non-destructive data is essential and indispensable to the technology progress of high-density LSI packaging. The latest systems with high resolution and high throughput will be shown in this paper. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Microfocus X-ray / X-ray Computed Tomography / High-density LSI / Three-dimensional non-destructive data / Inspection Technology |
| Paper # | EMD2003-6 |
| Date of Issue |
| Conference Information | |
| Committee | EMD |
|---|---|
| Conference Date | 2003/5/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Industrial microfocus CT technology and Its application for high-density LSI |
| Sub Title (in English) | |
| Keyword(1) | Microfocus X-ray |
| Keyword(2) | X-ray Computed Tomography |
| Keyword(3) | High-density LSI |
| Keyword(4) | Three-dimensional non-destructive data |
| Keyword(5) | Inspection Technology |
| 1st Author's Name | Akira HIRAKIMOTO |
| 1st Author's Affiliation | NDI Business Unit, Shimadzu Corp() |
| Date | 2003/5/9 |
| Paper # | EMD2003-6 |
| Volume (vol) | vol.103 |
| Number (no) | 58 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |