| Presentation | 2003/12/12 Effects of Film Thickness on Nanoindentation Characteristics of Carbon Thin Films Takanori HOSONO, Satoru NONOMIYA, Kensuke KANEKO, Issaku TANAKA, Shigeru UMEMURA, Shigeru HIRONO, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | To establish hardness evaluation methods for ultrathin films by nanoindentation, we deposited the carbon films of various thickness onto silicon substrates by RF sputtering and conducted the nanoindentation measurements of the films. The hardness data of the carbon films below 100 nm thickness were convolution of the inherent hardness oi the films and that of the substrate. Effects of the films thickness on the load-displacement curves in nanoindentation measurements were discussed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Nanoindentation / Thin film / Carbon films Hardness / AFM |
| Paper # | EMD2003-92 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 2003/12/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Effects of Film Thickness on Nanoindentation Characteristics of Carbon Thin Films |
| Sub Title (in English) | |
| Keyword(1) | Nanoindentation |
| Keyword(2) | Thin film |
| Keyword(3) | Carbon films Hardness |
| Keyword(4) | AFM |
| 1st Author's Name | Takanori HOSONO |
| 1st Author's Affiliation | Chiba Institute of Technology() |
| 2nd Author's Name | Satoru NONOMIYA |
| 2nd Author's Affiliation | Chiba Institute of Technology |
| 3rd Author's Name | Kensuke KANEKO |
| 3rd Author's Affiliation | Chiba Institute of Technology |
| 4th Author's Name | Issaku TANAKA |
| 4th Author's Affiliation | Chiba Institute of Technology |
| 5th Author's Name | Shigeru UMEMURA |
| 5th Author's Affiliation | Chiba Institute of Technology |
| 6th Author's Name | Shigeru HIRONO |
| 6th Author's Affiliation | NTT AFTY Corporation |
| Date | 2003/12/12 |
| Paper # | EMD2003-92 |
| Volume (vol) | vol.103 |
| Number (no) | 532 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |