Presentation 2003/8/22
Enhancement of magneto-optic effect in optical isolator with semiconductor guiding layer by selective oxidation of AlInAs
Yuya Shoji, Hideki Yokoi, Tetsuya Mizumoto,
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Abstract(in English) Optical waveguide isolators are important integrated optics components that protect optical active devices from unwanted reflection. Two optical isolators, employing nonreciprocal phase shifter and nonreciprocal guided-radiation mode conversion, with a semiconductor guiding layer are described. The former isolator needs long propagation distance for the nonreciprocal phase shift and the latter has few acceptable error range of the fabrication. Selective oxidation of AlInAs layer with low refractive index can enhance the magneto-optic effect and improve the characteristics. We successfully fabricated the optical waveguide with AlInAs-oxide under cladding layer and the refractive index of the AlInAs-oxide was estimated to be 2.45 at 1.55μm.
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Keyword(in English) optical isolator / direct bonding / semiconductor / selective oxidation
Paper # EMD2003-41,CPM2003-86,OPE2003-123,LQE2003-42
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Committee EMD
Conference Date 2003/8/22(1days)
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Registration To Electromechanical Devices (EMD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Enhancement of magneto-optic effect in optical isolator with semiconductor guiding layer by selective oxidation of AlInAs
Sub Title (in English)
Keyword(1) optical isolator
Keyword(2) direct bonding
Keyword(3) semiconductor
Keyword(4) selective oxidation
1st Author's Name Yuya Shoji
1st Author's Affiliation Graduate School of Science and Engineering, Tokyo Institute of Technology()
2nd Author's Name Hideki Yokoi
2nd Author's Affiliation Graduate School of Science and Engineering, Tokyo Institute of Technology:OITDA
3rd Author's Name Tetsuya Mizumoto
3rd Author's Affiliation Graduate School of Science and Engineering, Tokyo Institute of Technology:OITDA
Date 2003/8/22
Paper # EMD2003-41,CPM2003-86,OPE2003-123,LQE2003-42
Volume (vol) vol.103
Number (no) 268
Page pp.pp.-
#Pages 6
Date of Issue