| Presentation | 2002/11/7 Sensor and Actuator Interaction for Nanometer Positioning Microactuators Wen-Jong Wu, Chih-Kung Lee, Chun-Hui Lin, Zeng-De Chen, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The sensing mechanism of actuators is discussed in this paper. Some actuators like thermal and SMA wires actuators have a self-sensing mechanism which can be used to precisely control the displacement of actuators. The self-sensing mechanism of thermal wire actuators are detailed, analyzed and verified in this paper. Actuators cannot have a self-sensing mechanism like piezoelectric actuators since an external sensor is required in the control loop. A homodyne quadrature interferometer configuration with analog output capabilities was developed and verified on a closed-loop control of a stacked piezoelectric actuator to achieve a traceable nanometer scale precision actuating system. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | sensors / actuators / thermal wire actuator / self-sensing / quadrature homodyne / interferometer / closed-loop / piezoelectric actuators |
| Paper # | EMD2002-70 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 2002/11/7(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Sensor and Actuator Interaction for Nanometer Positioning Microactuators |
| Sub Title (in English) | |
| Keyword(1) | sensors |
| Keyword(2) | actuators |
| Keyword(3) | thermal wire actuator |
| Keyword(4) | self-sensing |
| Keyword(5) | quadrature homodyne |
| Keyword(6) | interferometer |
| Keyword(7) | closed-loop |
| Keyword(8) | piezoelectric actuators |
| 1st Author's Name | Wen-Jong Wu |
| 1st Author's Affiliation | Institute of Applied Mechanics, National Taiwan University() |
| 2nd Author's Name | Chih-Kung Lee |
| 2nd Author's Affiliation | Faculty, Institute of Applied Mechanics, National Taiwan University |
| 3rd Author's Name | Chun-Hui Lin |
| 3rd Author's Affiliation | Institute of Applied Mechanics, National Taiwan University |
| 4th Author's Name | Zeng-De Chen |
| 4th Author's Affiliation | Institute of Applied Mechanics, National Taiwan University |
| Date | 2002/11/7 |
| Paper # | EMD2002-70 |
| Volume (vol) | vol.102 |
| Number (no) | 452 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |