| Presentation | 2002/11/7 System Perspective of Electromechanical Devices Development Chih-Kung Lee, Wen-Jong Wu, Pei-Zen Chang, Long-Sun Huang, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Some electromechanical devices and systems produced using MEMS fabrication processes are detailed. Two precision measurement metrologies for inspecting electromechanical products are also described. As the trend of electromechanical device development is towards pursuing smaller and smaller sizes with robust mechanisms and powerful functions, micro-electric-mechanical system (MEMS) devices come with the tide of fashion. Three examples are discussed in detail in this paper: CMOS compatible sensors, RF/microwave components, and packaged and integrated passives devices. The design thinking of a new free-fall sensor, which is an accelerometer and possesses a surprisingly low frequency response and broad bandwidth, is mentioned. In addition, an AVID (A___dvanced V___ibrometer/I___nterferometer D___evice) system for measuring tiny displacement and a Morphinscope system which has the advantages of a confocal microscope combined with a photon tunneling microscope, both developed by NTU's MEMS/NEMS group are discussed. The excellent sensing ability of the free-fall sensor and the accuracy resolution of the two measurement systems are proved by experimental verification. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MEMS / sensors / actuators / precision measurement / AVID / Morphinscope |
| Paper # | EMD2002-68 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 2002/11/7(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | System Perspective of Electromechanical Devices Development |
| Sub Title (in English) | |
| Keyword(1) | MEMS |
| Keyword(2) | sensors |
| Keyword(3) | actuators |
| Keyword(4) | precision measurement |
| Keyword(5) | AVID |
| Keyword(6) | Morphinscope |
| 1st Author's Name | Chih-Kung Lee |
| 1st Author's Affiliation | Faculty, Institute of Applied Mechanics, National Taiwan University() |
| 2nd Author's Name | Wen-Jong Wu |
| 2nd Author's Affiliation | Institute of Applied Mechanics, National Taiwan University |
| 3rd Author's Name | Pei-Zen Chang |
| 3rd Author's Affiliation | Faculty, Institute of Applied Mechanics, National Taiwan University |
| 4th Author's Name | Long-Sun Huang |
| 4th Author's Affiliation | Faculty, Institute of Applied Mechanics, National Taiwan University |
| Date | 2002/11/7 |
| Paper # | EMD2002-68 |
| Volume (vol) | vol.102 |
| Number (no) | 452 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |