Presentation 2004/1/21
Visualization of In-plane Vibration in Piezoelectric Resonator with Polished Surface using Reflection Characteristics of Electrode Materials
Y. WATANABE, S. GOKA, T. YAMAMOTO, T. SATO, H. SEKIMOTO,
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Abstract(in English) For visualizing the in-plane mode shapes of piezoelectric devices with polished surfaces, a non-mechanical scanning method has been developed. By taking into account the reflection vs. laser-wavelength characteristics of the material of the electrodes, the in-plane motion has been measured even if the surface of the measurement plane is polished as a mirror. The experimental results for fundamental thickness-shear and nearby inharmonic modes in a bi-mesa shaped rectangular AT-cut quartz resonator have been presented.
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Keyword(in English) Polished Surface / Piezoelectric Resonator / In-plane vibration / Electrode
Paper # EA2003-130
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Committee EA
Conference Date 2004/1/21(1days)
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Registration To Engineering Acoustics (EA)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Visualization of In-plane Vibration in Piezoelectric Resonator with Polished Surface using Reflection Characteristics of Electrode Materials
Sub Title (in English)
Keyword(1) Polished Surface
Keyword(2) Piezoelectric Resonator
Keyword(3) In-plane vibration
Keyword(4) Electrode
1st Author's Name Y. WATANABE
1st Author's Affiliation Graduate School of Engineering, Tokyo Metropolitan University()
2nd Author's Name S. GOKA
2nd Author's Affiliation Graduate School of Engineering, Tokyo Metropolitan University
3rd Author's Name T. YAMAMOTO
3rd Author's Affiliation Graduate School of Engineering, Tokyo Metropolitan University
4th Author's Name T. SATO
4th Author's Affiliation Graduate School of Engineering, Tokyo Metropolitan University
5th Author's Name H. SEKIMOTO
5th Author's Affiliation Graduate School of Engineering, Tokyo Metropolitan University
Date 2004/1/21
Paper # EA2003-130
Volume (vol) vol.103
Number (no) 608
Page pp.pp.-
#Pages 4
Date of Issue