| Presentation | 2003/9/22 Micromachining approach to nano/bio technology Gen Hashiguchi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper describes our approach to nano/bio technology based on micromachining techniques. Fabrication principle of Si nano structures using the anisotropic etching of Si technique is first mentioned, followed by its application to a single electron transistor fabrication. After that, three types of nano probe devices, named multi nano probe, nano tester and DNA nano tweezers, are presented briefly. A DNA retrieval experiment using the developed nano tweezers is also demonstrated. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | micromachining / nano technology / Si anisotropic etching / nano probe |
| Paper # | MLP2003-68 |
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| Conference Information | |
| Committee | NLP |
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| Conference Date | 2003/9/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Nonlinear Problems (NLP) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Micromachining approach to nano/bio technology |
| Sub Title (in English) | |
| Keyword(1) | micromachining |
| Keyword(2) | nano technology |
| Keyword(3) | Si anisotropic etching |
| Keyword(4) | nano probe |
| 1st Author's Name | Gen Hashiguchi |
| 1st Author's Affiliation | Faculty of Engineering, Kagawa University() |
| Date | 2003/9/22 |
| Paper # | MLP2003-68 |
| Volume (vol) | vol.103 |
| Number (no) | 335 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |