Presentation 2004/1/17
Growth and luminescence study of Zn_XCd_<1-X>O films using remote plasma MOCVD
Junji Ishihara, Atushi Nakamura, Satoshi Shigemori, Toru Aoki, Jiro Temmyo,
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Abstract(in English) Using remote plasma MOCVD, Zn_XCd_<1-X>O films were grown with DEZn and DMCd as II group agents. The Zn content in the ZnCdO films were turned by changing of II group agents flow rate. By increasing the Zn content in the ZnCdO films, crystal structures were shifted from rock-salt structure to wurzite structure. Optical band-gap shifted from 1.9eV to 3.4eV by changing Zn content in the ZnCdO films. Moreover we obtained the direct band-gap of Zn_XCd_<1-X>O films having wurzite structure at x〓0.3.
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Keyword(in English) ZnCdO / remote plasma MOCVD / DEZn / DMCd
Paper # EID2003-75
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Committee EID
Conference Date 2004/1/17(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Growth and luminescence study of Zn_XCd_<1-X>O films using remote plasma MOCVD
Sub Title (in English)
Keyword(1) ZnCdO
Keyword(2) remote plasma MOCVD
Keyword(3) DEZn
Keyword(4) DMCd
1st Author's Name Junji Ishihara
1st Author's Affiliation Research Institute of Electronics, Shizuoka University()
2nd Author's Name Atushi Nakamura
2nd Author's Affiliation Graduate School of Electronic Science and Technology, Shizuoka University
3rd Author's Name Satoshi Shigemori
3rd Author's Affiliation Research Institute of Electronics, Shizuoka University
4th Author's Name Toru Aoki
4th Author's Affiliation Research Institute of Electronics, Shizuoka University
5th Author's Name Jiro Temmyo
5th Author's Affiliation Research Institute of Electronics, Shizuoka University:Graduate School of Electronic Science and Technology, Shizuoka University
Date 2004/1/17
Paper # EID2003-75
Volume (vol) vol.103
Number (no) 594
Page pp.pp.-
#Pages 4
Date of Issue