| Presentation | 2004/1/17 Studies on surface treatment and surface states of ITO substrate Suiko TANAKA, Hiroki YOSHIHARA, Haruki INABA, TAKUYO Nakamura, Yosuke TANAKA, Hroyuki KUSANO, Masahiko Kitagawa, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have investigated the treatment dependence of the etching rate, surface roughness, composition, contamination and electron energy distribution of the surface of the ITO substrate by using wet-chemical and dry-UV treatment methods. The depth pofile of the micro-surface roughness, In-Sn-O composition, C-contamination have been clarified by atomic force micro scope (AFM) and X-ray photoelectron spectroscopy(XPS). Also electron energy distribution has been investigated on the ITO suface. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Indium tin oxide(ITO) / surface treatment / X-ray photoelectron spectroscopy(XPS) / Atomic force microscope(AFM) |
| Paper # | EID2003-60 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 2004/1/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Studies on surface treatment and surface states of ITO substrate |
| Sub Title (in English) | |
| Keyword(1) | Indium tin oxide(ITO) |
| Keyword(2) | surface treatment |
| Keyword(3) | X-ray photoelectron spectroscopy(XPS) |
| Keyword(4) | Atomic force microscope(AFM) |
| 1st Author's Name | Suiko TANAKA |
| 1st Author's Affiliation | Department of Electrical and Electronic Engineering, Tottori University() |
| 2nd Author's Name | Hiroki YOSHIHARA |
| 2nd Author's Affiliation | Department of Electrical and Electronic Engineering, Tottori University |
| 3rd Author's Name | Haruki INABA |
| 3rd Author's Affiliation | Department of Electrical and Electronic Engineering, Tottori University |
| 4th Author's Name | TAKUYO Nakamura |
| 4th Author's Affiliation | Department of Electrical and Electronic Engineering, Tottori University |
| 5th Author's Name | Yosuke TANAKA |
| 5th Author's Affiliation | Department of Electrical and Electronic Engineering, Tottori University |
| 6th Author's Name | Hroyuki KUSANO |
| 6th Author's Affiliation | Research Institute of Technology, Tottoti Prefecture |
| 7th Author's Name | Masahiko Kitagawa |
| 7th Author's Affiliation | Department of Electrical and Electronic Engineering, Tottori University |
| Date | 2004/1/17 |
| Paper # | EID2003-60 |
| Volume (vol) | vol.103 |
| Number (no) | 594 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |