Presentation | 2003/1/20 Oxidation process to ZnO from ZnS epitaxial film on Si substrate Aki MIYAKE, Takato NAKAMURA, Naoto AZUMA, Toru AOKI, Hiroko KOMINAMI, Yoichiro NAKANISHI, Yoshinori HATANAKA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | ZnO epitaxial thin film was obtained on Si substrate by oxidation of ZnS epitaxial thin film deposited on Si substrate. This oxidation process was analyzed by using Gibbs free energy calculation and TG-DTA measurement. TG curve had one step and the weight change showed about 16.4% decrease. DTA curve had one peak. It was shown from calculation result and TG-DTA, ZnS is changed to ZnO by one step. Expected reactions are ZnS+3/20_2→ZnO+SO_2,ZnO+SO_2→ZnO+SO_3,ZnS+1/20_2→ZnO+2/1S_2 |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | ZnS / ZnO / oxidation / Gibbs free energy / TG-DTA |
Paper # | EID20002-100 |
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Conference Information | |
Committee | EID |
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Conference Date | 2003/1/20(1days) |
Place (in Japanese) | (See Japanese page) |
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Registration To | Electronic Information Displays (EID) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Oxidation process to ZnO from ZnS epitaxial film on Si substrate |
Sub Title (in English) | |
Keyword(1) | ZnS |
Keyword(2) | ZnO |
Keyword(3) | oxidation |
Keyword(4) | Gibbs free energy |
Keyword(5) | TG-DTA |
1st Author's Name | Aki MIYAKE |
1st Author's Affiliation | Graduate School of Electronic Science and Technology,Shizuoka University() |
2nd Author's Name | Takato NAKAMURA |
2nd Author's Affiliation | Faculty of engineering,Shizuoka University |
3rd Author's Name | Naoto AZUMA |
3rd Author's Affiliation | Faculty of engineering,Shizuoka University |
4th Author's Name | Toru AOKI |
4th Author's Affiliation | Research Institute of Electronics,Shizuoka University |
5th Author's Name | Hiroko KOMINAMI |
5th Author's Affiliation | Graduate School of Electronic Science and Technology,Shizuoka University |
6th Author's Name | Yoichiro NAKANISHI |
6th Author's Affiliation | Graduate School of Electronic Science and Technology,Shizuoka University:Research Institute of Electronics,Shizuoka University |
7th Author's Name | Yoshinori HATANAKA |
7th Author's Affiliation | Aichi University of Technology |
Date | 2003/1/20 |
Paper # | EID20002-100 |
Volume (vol) | vol.102 |
Number (no) | 600 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |