| Presentation | 2004/2/12 Proposal of Estimation Method for Discharging Part in a Plasma Chamber Yu ISHIWATA, Kenichi KAGOSHIMA, Shigeki OBOTE, Kouichi SUZUKI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A lot of plasma devices are used to process semiconductors and the liquid crystals. Recently, plasma technology is needed from the necessity of the micro fabrication processing technology, but abnormal electrical discharge that is called a micro arc is generated in the vacuum chamber, and a serious problem related to productivity of the device ceased, quality degradation by the particle, damage of the surface on the wafer, a dielectric breakdown of the device at times, are caused. The way to confirm of the presence that abnormal electrical discharging generations is thought as the first step for problems are solved. Although the method of detecting light, the sound wave vibration and abnormality of the current in the power supply circuit are being examined now when abnormal electrical discharge is generated, the completely real-time detection has not achieved, further it is difficult to estimate the generation part. Then, structural conditions which needed to estimate the generation part in plasma chamber are confirmed by the simulation and this paper report the result of investigation about estimation by electromagnetic wave detection. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Plasma Chamber / Abnormal Electrical Discharge / Electromagnetic Wave / Hyperbola Estimation Method |
| Paper # | A・P2003-279 |
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| Conference Information | |
| Committee | AP |
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| Conference Date | 2004/2/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Antennas and Propagation (A・P) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Proposal of Estimation Method for Discharging Part in a Plasma Chamber |
| Sub Title (in English) | |
| Keyword(1) | Plasma Chamber |
| Keyword(2) | Abnormal Electrical Discharge |
| Keyword(3) | Electromagnetic Wave |
| Keyword(4) | Hyperbola Estimation Method |
| 1st Author's Name | Yu ISHIWATA |
| 1st Author's Affiliation | Department of Media and Telecommunications Engineering, Faculty of Engineering, Ibaraki University() |
| 2nd Author's Name | Kenichi KAGOSHIMA |
| 2nd Author's Affiliation | Department of Media and Telecommunications Engineering, Faculty of Engineering, Ibaraki University |
| 3rd Author's Name | Shigeki OBOTE |
| 3rd Author's Affiliation | Department of Media and Telecommunications Engineering, Faculty of Engineering, Ibaraki University |
| 4th Author's Name | Kouichi SUZUKI |
| 4th Author's Affiliation | Fab Solutions Company Limited |
| Date | 2004/2/12 |
| Paper # | A・P2003-279 |
| Volume (vol) | vol.103 |
| Number (no) | 655 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |