Presentation | 2003/5/19 Electrical Characterization of Organic Thin Films by Conductivity and Field Effect Transistor Measurement Using Micro Four-Point Probe H. Ohguri, T. Tamaki, H. Yanagisawa, M. Nakamura, M. lizuka, K. Kudo, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have developed a high-vacuum micro-four-point-probe (MFPP) microscope by combining 5-30 μm spacing integrated MFPPs with atomic force microscope. The microscope was confirmed to have an ability to measure conductivity profile of an organic conductive thin film. MFPP field effect transistor (MFPP-FET measurements of organic semiconductive films, pentacene by molecular beam deposition, were also performed using oxidized silicon substrates as gate electrodes. By this method, 'true' electronic properties of only the semiconductor/gate insulator interface could be measured without any interference by metal/organic contact resistance, modulation of the contact resistance or degradation of the organic material due to, for example, heat during the metal deposition. Carrier mobilities obtained by MFPP-FET were compared with those by conventional FET measurements. Positive correlation between mobility and subthreshold slope was found by the MFPP-FET measurements. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | SPM / Micro Four-Point Probe / Organic semiconductor / Pentacene / FET measurement |
Paper # | OME2003-22 |
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Conference Information | |
Committee | OME |
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Conference Date | 2003/5/19(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Organic Material Electronics (OME) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Electrical Characterization of Organic Thin Films by Conductivity and Field Effect Transistor Measurement Using Micro Four-Point Probe |
Sub Title (in English) | |
Keyword(1) | SPM |
Keyword(2) | Micro Four-Point Probe |
Keyword(3) | Organic semiconductor |
Keyword(4) | Pentacene |
Keyword(5) | FET measurement |
1st Author's Name | H. Ohguri |
1st Author's Affiliation | Department of Electronics and Mechanical Engineering, Chiba University() |
2nd Author's Name | T. Tamaki |
2nd Author's Affiliation | Department of Electronics and Mechanical Engineering, Chiba University |
3rd Author's Name | H. Yanagisawa |
3rd Author's Affiliation | Department of Electronics and Mechanical Engineering, Chiba University |
4th Author's Name | M. Nakamura |
4th Author's Affiliation | Department of Electronics and Mechanical Engineering, Chiba University |
5th Author's Name | M. lizuka |
5th Author's Affiliation | Department of Electronics and Mechanical Engineering, Chiba University |
6th Author's Name | K. Kudo |
6th Author's Affiliation | Department of Electronics and Mechanical Engineering, Chiba University |
Date | 2003/5/19 |
Paper # | OME2003-22 |
Volume (vol) | vol.103 |
Number (no) | 84 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |