Presentation 2003/5/19
Electrical Characterization of Organic Thin Films by Conductivity and Field Effect Transistor Measurement Using Micro Four-Point Probe
H. Ohguri, T. Tamaki, H. Yanagisawa, M. Nakamura, M. lizuka, K. Kudo,
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Abstract(in English) We have developed a high-vacuum micro-four-point-probe (MFPP) microscope by combining 5-30 μm spacing integrated MFPPs with atomic force microscope. The microscope was confirmed to have an ability to measure conductivity profile of an organic conductive thin film. MFPP field effect transistor (MFPP-FET measurements of organic semiconductive films, pentacene by molecular beam deposition, were also performed using oxidized silicon substrates as gate electrodes. By this method, 'true' electronic properties of only the semiconductor/gate insulator interface could be measured without any interference by metal/organic contact resistance, modulation of the contact resistance or degradation of the organic material due to, for example, heat during the metal deposition. Carrier mobilities obtained by MFPP-FET were compared with those by conventional FET measurements. Positive correlation between mobility and subthreshold slope was found by the MFPP-FET measurements.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) SPM / Micro Four-Point Probe / Organic semiconductor / Pentacene / FET measurement
Paper # OME2003-22
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Committee OME
Conference Date 2003/5/19(1days)
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Registration To Organic Material Electronics (OME)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Electrical Characterization of Organic Thin Films by Conductivity and Field Effect Transistor Measurement Using Micro Four-Point Probe
Sub Title (in English)
Keyword(1) SPM
Keyword(2) Micro Four-Point Probe
Keyword(3) Organic semiconductor
Keyword(4) Pentacene
Keyword(5) FET measurement
1st Author's Name H. Ohguri
1st Author's Affiliation Department of Electronics and Mechanical Engineering, Chiba University()
2nd Author's Name T. Tamaki
2nd Author's Affiliation Department of Electronics and Mechanical Engineering, Chiba University
3rd Author's Name H. Yanagisawa
3rd Author's Affiliation Department of Electronics and Mechanical Engineering, Chiba University
4th Author's Name M. Nakamura
4th Author's Affiliation Department of Electronics and Mechanical Engineering, Chiba University
5th Author's Name M. lizuka
5th Author's Affiliation Department of Electronics and Mechanical Engineering, Chiba University
6th Author's Name K. Kudo
6th Author's Affiliation Department of Electronics and Mechanical Engineering, Chiba University
Date 2003/5/19
Paper # OME2003-22
Volume (vol) vol.103
Number (no) 84
Page pp.pp.-
#Pages 6
Date of Issue